Abstract
Nanostructured carbon thin films can be grown by deposition of cluster beams produced in supersonic expansions. By using a pulsed microplasma cluster source and by exploiting aerodynamic focusing effects typical of supersonic expansions, the structure and the properties of the films can be controlled by varying the cluster mass distribution prior to deposition. Nanocomposite films can be produced by co-depositing carbon clusters and metallic nanoparticles.
The films have been characterized by various spectroscopic techniques and tested in view of applications for field emission, supercapacitors, gas sensing. The possibility of patterning cluster-assembled carbon films by shadow masking or by ultraviolet photon irradiation suggests interesting perspective for the integration of nanostructured carbon films on microfabricated devices and for the production of components for an all-carbon electronics.
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Bongiorno, G., Podestà, A., Ravagnan, L. et al. Electronic properties and applications of cluster-assembled carbon films. J Mater Sci: Mater Electron 17, 427–441 (2006). https://doi.org/10.1007/s10854-006-8089-4
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DOI: https://doi.org/10.1007/s10854-006-8089-4