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Investigation of structural properties of amorphous carbon nitride thin films prepared by xenon cloride pulsed laser deposition of camphoric carbon precursor

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Abstract

Raman scattering analysis revealed that the structure of carbon (C) films prepared by pulsed laser deposition at room temperature is predominantly amorphous and the structure of amorphous C nitride (a-CN x ) films can be changed with varying substrate temperatures (ST) from 20 to 500 °C. The deposited a-CN x films are composed of C-N, C-N and C-O bonded materials and the C-N and C=N bonds are increased with ST. We have found no other obvious peaks can be distinguished in the range 900 to 2300 cm−1 in which several peaks always appear in a-CN x films. The spectra were deconvoluted into Raman D and G peaks and the structural parameters are determined. The upward shifts of Raman G peak towards 1592 cm−1 shows the evidence of a progressive formation of crystallites in a-CN x films upon increase of ST. While, the upward shifts of Raman D peak towards 1397 cm−1 have been related to the decreased of bond-angle disorder and sp3 tetrahedral bonding in its structure. Raman FWHM and IDIG also indicate that N incorporation with increased of ST caused an increase in the number and/or size of graphitic domains in the a-CN x films.

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References

  1. D. S. KNIGHT and W. B. WHITE, J. Mater. Res. 4 (1989) 385.

    CAS  Google Scholar 

  2. Y. AOI, K. ONO, K. SAKURADA, E. KAMIJO, M. SASAKI and K. SAKAYAMA, Thin Solid Films 389 (2001) 62.

    Article  CAS  Google Scholar 

  3. J. S. LEE, K. S. LIU and I. N. LIN, Appl. Phys. Lett. 68 (1996) 1666.

    Article  Google Scholar 

  4. M. H. GRIMSDITCH and A. K. RAMDAS, Phys. Rev. B 11 (1975) 3139.

    Article  CAS  Google Scholar 

  5. V. MEENAKSHI, A. SAYEED and S. V. SUBRAMANYAM, Mater. Sci. Forum 223 (1996) 307.

    Google Scholar 

  6. R. O. DILLON, J. A. WOOLLAM and V. KATKANANT, Phys. Rev. B 29 (1984) 3482.

    CAS  Google Scholar 

  7. F. TUINSTRA and J. L. KOENIG, J. Chem. Phys. 53 (1970) 1126.

    Article  CAS  Google Scholar 

  8. R. J. NEMANICH and G. LUCOVSKY, Solid State Commun. 23 (1977) 117.

    Article  CAS  Google Scholar 

  9. D. BEEMAN, J. SILVERMAN, R. LYNDS and M. R. ANDERSON, Phys. Rev. B 30(2) (1984) 870.

    Article  CAS  Google Scholar 

  10. R. J. NEMANICH and S. A. SOLIN, ibid. 20 (1979) 392.

    Article  CAS  Google Scholar 

  11. J. SHIAO and R. W. HOFFMAN, Thin Solid Films 283 (1996) 145.

    Article  CAS  Google Scholar 

  12. J. SCHWAN, S. ULRICH, V. BATORI, H. EHRHARDT and S. R. P. SILVA, J. Appl. Phys. 80 (1996) 440.

    Article  CAS  Google Scholar 

  13. R. KALISH, Y. LIFSHITZ, K. NUGENT and S. PRAWER, Appl. Phys. Lett. 74 (1999) 2936.

    CAS  Google Scholar 

  14. M. A. TAMOR and W. C. VASSELL, J. Appl. Phys. 76 (1994) 3823.

    Article  CAS  Google Scholar 

  15. J. P. ZHAO, Z. Y. CHEN, T. YANO, T. OOIE and M. YONEDA, ibid. 89(3) (2001) 1580.

    Article  CAS  Google Scholar 

  16. J. H. KAUFMAN, S. METIN and D. D. SAPERSTEIN, Phys. Rev. B 39 (1989) 13053.

    Article  CAS  Google Scholar 

  17. D. Y. LEE, Y. H. KIM, I. K. KIM and H. K. BAIK, Thin Solid Films 355 (1999) 239.

    Article  Google Scholar 

  18. H. TSAI and D. B. BOGGY, J. Vac. Sci. Technol. A 5 (1987) 3287.

    Google Scholar 

  19. C. J. TORNG, J. M. SILVERTSEN, J. H. JUDY and C. CHANG, J. Mater. Res. 5 (1990) 2490.

    CAS  Google Scholar 

  20. M. Y. CHEN, D. LI, X. LIN, V. P. DRAVID, Y. W. CHUNG, M. S. WONG and W. D. SPROUL, J. Vac. Sci. Technol. A 11 (1993) 521.

    Google Scholar 

  21. H. X. HAN and B. J. FELDMAN, Solid State Commun. 65 (1988) 921.

    Article  CAS  Google Scholar 

  22. M. WIXOM, J. Am. Ceram. Soc. 73 (1990) 1973.

    Article  CAS  Google Scholar 

  23. G. MARIOTTO, F. L. FREIRE JR}. and C. A. ACHETE, Thin Solid Films 241 (1994) 255.

    Article  CAS  Google Scholar 

  24. F. ROSSI, B. ANDRE, A. VEEN, P.E. MIJNARENDS, H. SCHUT, F. LABOHM, H. DUNLOP, M. P. DELPLANCKE and K. HUBBARD, J. Mater. Res. 9 (1994) 2440.

    CAS  Google Scholar 

  25. S. M. MOMINUZZAMAN, K. M. KRISHNA, T. SOGA, T. JIMBO and M. UMENO, Jpn. J. Appl. Phys. 38 (1999) 658.

    Article  CAS  Google Scholar 

  26. Idem., Carbon 38 (2000) 127.

    Article  CAS  Google Scholar 

  27. J. SCHWAN, S. ULRICH, V. BATORI, H. EHRHARDT and S. R. P. SILVA, J. Appl. Phys. 80 (1996) 440.

    Article  CAS  Google Scholar 

  28. N. H. CHO, K. M. KRISHNAN, D. K. VEIRS, M. D. RUBIN, C. B. HOPPER, B. BHUSHAN and D. B. BOGGY, J. Mater. Res. 5 (1990) 2543.

    CAS  Google Scholar 

  29. P. PAPAKONSTANTINOU, D. A. ZEZE, A. KLINI and J. MCLAUGHLIN, Diamond Relat. Mater. 10 (2001) 1109.

    Article  CAS  Google Scholar 

  30. Y. K. YAP, S. KIDA, T. AOYAMA, Y. MORI and T. SASAKI, Appl. Phys. Lett. 73 (1998) 7.

    Article  Google Scholar 

  31. H. C. BARSHILIA, S. SAH, B. R. MEHRA, V. D. VANKAR, D. K. AVASTHI and G. K. MEHTA, Thin Solid Films 258 (1995) 123.

    Article  CAS  Google Scholar 

  32. T. WERNIGHAUS, D. R. T. ZAHN, E. G. WANG and Y. CHEN, Diamond Relat. Mater. 7 (1998) 52.

    Article  Google Scholar 

  33. P. N. WANG, Z. GUO, X. T. YING, J. H. CHEN, X. M. XU and F. M. LI, Phys. Rev. B 59 (1999) 13347.

    CAS  Google Scholar 

  34. T. Y. YEN and C. P. CHOU, Solid State Commun. 95 (1995) 281.

    Article  CAS  Google Scholar 

  35. Idem., Appl. Phys. Lett. 67(19) (1995) 2801.

    Article  CAS  Google Scholar 

  36. S. R. P. SILVA, R. U. A. KHAN, A. P. BARDEN, J. V. ANGUITA, J. M. SHANNON, B. J. SEALY, A. J. PAPWORTH, C. J. KEILY and G. A. J. AMARATUNGA, Thin Solid Films 332 (1998) 118.

    Article  CAS  Google Scholar 

  37. Y. H. CHENG, X. L. QIAO, J. G. CHEN, Y. P. WU, C. S. XIE, Y. Q. WANG, D. S. XU, H. KUPFER, F. RICHTER, S. B. MO and Y. B. SUN, Diam. Relat. Mater. 11 (2002) 1511.

    Article  CAS  Google Scholar 

  38. P. N. WANG, Z. GUO and X. T. YING, Phys. Rev. B 61(20) (1999) 13347.

    Article  Google Scholar 

  39. A. BOUSETTA, M. LU and A. BENSAOULA, J. Vac. Sci. Technol. A 13 (1995) 1639.

    Google Scholar 

  40. A. BOUSETTA, M. LU, A. BENSAOULA and A. SCHULTZ, Appl. Phys. Lett. 65 (1994) 696.

    Article  CAS  Google Scholar 

  41. C. M. LIEBER and Z. J. ZHANG, Adv. Mater. 6 (1994) 497.

    Article  CAS  Google Scholar 

  42. A. LIU and M. L. COHEN, Science 245 (1989) 841.

    CAS  Google Scholar 

  43. Idem., Phys. Rev. B 41 (1990) 10727.

    Article  CAS  Google Scholar 

  44. N. WADA, S. A. SOLIN, J. WONG and S. PROCHAZKA, J. Non-Cryst. Solids 43 (1981) 7.

    Article  CAS  Google Scholar 

  45. Z. M. REN, Y. C. DU, Z. F. YING, Y. X. QIU, X. X. XIONG, J. D. WU and F. M. LI, Appl. Phys. Lett. 65(11) (1994) 1361.

    Article  CAS  Google Scholar 

  46. Z. M. REN, P. N. WANG, Y. C. DU and Z. F. YING, Appl. Phys. A 65 (1997) 107.

    Article  Google Scholar 

  47. S. L. SUNG, C. H. TSENG, F. K. CHIANG, X. J. GUO and X. W. LIU, Thin Solid Films 340 (1999) 169.

    Article  CAS  Google Scholar 

  48. T. W. SCAF, R. D. OTT, D. YANG and J. A. BARNARD, J. Appl. Phys. 85 (1999) 3142.

    Article  Google Scholar 

  49. Y. F. LU, Z. M. REN, W. D. SONG, D. S. H. CHAN, T. S. LOW, K. GAMANI, G. CHEN and K. LI, ibid. 84 (1998) 2909.

    Article  CAS  Google Scholar 

  50. M. FRIEDRICH, T. WELZEL, R. ROCHOTZKI, H. KUPFER and D. R. T. ZOHN, Diam. Relat. Mater. 6 (1997) 33.

    Article  CAS  Google Scholar 

  51. X. A. ZHAO, C. W. ONG, Y. C. TSANG, Y. W. WONG, P. W. CHAN and C. L. CHOY, Appl. Phys. Lett. 66 (1995) 2652.

    Article  CAS  Google Scholar 

  52. Y. AOI, K. ONO and E. KAMIJO, J. Appl. Phys. 86 (1999) 2318.

    Article  CAS  Google Scholar 

  53. Z. Y. CHEN, J.P. ZHAO, T. YANO, T. OOIE, M. YONEDA and J. SAKAKIBARA, ibid. 88(12) (2000) 7060.

    Article  CAS  Google Scholar 

  54. J. J. CUOMO, P. A. LEARY, D. YU, W. REUTER and M. FRISH, J. Vac. Sci. Technol. 16 (1979) 299.

    Article  CAS  Google Scholar 

  55. N. C. CHO, D. K. VEIRS, J. W. AGER, M. D. RUBIN, C. B. HOOPER and D. B. BOGY, J. Appl. Phys. 71 (1992) 2243.

    Article  CAS  Google Scholar 

  56. F. L. FREIRE JR., C. A. ACHETE, G. MARIOTTO and R. CANTERI, J. Vac. Sci. Technol. A 12 (1994) 3048.

    Google Scholar 

  57. F. L. FREIRE JR. and D. F. FRANCHESCHINI, Thin Solid Films 293 (1997) 236.

    Article  CAS  Google Scholar 

  58. S. PRAWER, K. W. NUGENT, Y. LIFSHITZ, G. D. LEMPERT, E. GROSSMAN, R. KALISH and Y. AVIGAL, Diam. Relat. Mater. 5 (1996) 433.

    Article  CAS  Google Scholar 

  59. E. H. LEE, J. D. M. HEMBREE, G. R. RAO and L. K. MANSUR, Phys. Rev. B 48(21) (1993) 15540.

    Article  CAS  Google Scholar 

  60. F. RICHTER, K. BEWILOGUA, H. KUPTER, I. MUHLING, B. RAU, B. ROTHER and D. SCHUMACHER, Thin Solid Films 212(1) (1992) 245.

    Article  CAS  Google Scholar 

  61. Y. G. GOGOTSI and M. YOSHIMURA, Nature 367(6464) (1994) 628.

    Article  CAS  Google Scholar 

  62. E. J. CHI, J. Y. SHIM, D. J. CHOI and H. K. BAIK, J. Vac. Sci. Technol. B 16 (1998) 1219.

    Article  CAS  Google Scholar 

  63. L. K. CHEAH, X. SHI, B. K. TAY, S. R. P. SILVA and Z. SUN, Diam. Relat. Mater. 7 (1998) 640.

    Article  CAS  Google Scholar 

  64. T. HAN, N. LEE, S. W. LEE, S. H. KIM and D. JEON, J. Vac. Sci. Technol. B 16 (1998) 2052.

    Article  CAS  Google Scholar 

  65. D. BEEMAN and J. SILVERMAN, Phys. Rev. B 5 (1972) 4951.

    Article  Google Scholar 

  66. B. DORFMAN, M. ABRAIZOV, F. H. POLLAK, D. YAN, M. STRNGIN, X. Q. YANG and Z. Y. RONG, Mater. Res. Soc. Symp. Proc. 349 (1994) 547.

    CAS  Google Scholar 

  67. Z. M. REN, Y. F. LU, D. H. K. HO, T. C. CHONG, B. A. CHEONG, S. I. PANG, J. P. WANG} and L. LI, Jpn. J. Appl. Phys. Part 1 38 (1999) 4859.

    Article  CAS  Google Scholar 

  68. M. A. BAKER and P. HAMMER, Surf. Inter. Anal. 25 (1997) 629.

    Article  CAS  Google Scholar 

  69. M. A. TAMOR, J. A. HAIRE, C. H. WU and K. C. HASS, Appl. Phys. Lett. 54 (1989).

  70. J. J. HAUSER, J. Non-Cryst. Solids 23 (1977) 21.

    Article  Google Scholar 

  71. J. TAUC, in “Amorphous and Liquid Semiconductors” (Plenum Press, London, New York, 1974) Chap. 4.

    Google Scholar 

  72. J. TAUC, R. GRIGOROVICI and A. VANCU, Phys. Status Solidi 15 (1966) 627.

    CAS  Google Scholar 

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  1. Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Showa-ku, Nagoya, 466-8555, Japan

    M. Rusop, T. Soga & T. Jimbo

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  1. M. Rusop
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  2. T. Soga
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Rusop, M., Soga, T. & Jimbo, T. Investigation of structural properties of amorphous carbon nitride thin films prepared by xenon cloride pulsed laser deposition of camphoric carbon precursor. J Mater Sci: Mater Electron 16, 365–375 (2005). https://doi.org/10.1007/s10854-005-1148-4

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