Abstract
Precipitation and growth behavior of AlN from Cu-Al-Ti-N solution under the atmospheric pressure of nitrogen has been studied. The solubility of AlN in Cu flux ranges from 5 mol% to 20 mol% at the temperatures between 1700 ∘C and 2000 ∘C. The addition of the proper amount of Ti drastically enhances the solubility of AlN. Acicular crystallites and platelets of AlN precipitants, which were all water white colored, were obtained by super-cooling the Cu-Al-Ti-N solution. The largest pencil type AlN reached more than 3 mm in its length and 0.2 mm in its diameter. The axis of the pencil was c-axis of wurtzite AlN and it contained no dislocation, no diffractive defects. A platelet of AlN of which diameter exceeded 1.5 mm was also obtained by regrowth technique. Thermodynamic calculation reveals the validity of using Cu-Al-Ti-N solution for the growth of AlN.
Similar content being viewed by others
References
K. M. TAYLOR and C. LENIE, J. Electrochem. Soc.107 (1960) 308.
T. MATSUMURA and Y. TANABE, J. Phys. Soc. Jap.15 (1960) 203.
C. M. DRUM, J. Appl. Phys.36 (1965) 816.
C. M. DRUM, J. Appl. Phys.36 (1965) 824.
C. M. DRUM, Phil. Mag.25 (1965) 313.
T. ISHII, T. SATO and M. IWATA, Mineralogical J.6 (1971) 323.
C. O. DUGGER, Mat. Res. Bull.9 (1974) 331.
G. A. SLACK and T. F. MCNELLY, J. Cryst. Growth34 (1976) 263.
G. A. SLACK and T. F. MCNELLY, J. Cryst. Growth45 (1977) 560.
Y. SHI, Z. Y. XIE, L. H. LIU, J. H. EDGAR and M. KUBALL, J. Crystal Growth233 (2001) 177.
J. C. ROJO, L. J. SCHOWALTER and K. MORGAN, Mat. Res. Soc. Symp. Proc.680E (2001) E2.1.1.
R. SCHLESSER and Z. SITAR, J. Cryst. Growth234 (2002) 349.
M. TANAKA, S. NAKAMURA, K. SOGABE, H. NAKATA and M. TOBIOKA, Jpn. J. Appl. Phys.36 (1997) L1062.
M. BOCKOWSKI, M. WROBLEWSKI, B. LUCZNIK and I. GRZEGORY, Mater. Sci. in Semiconductor Process.4 (2001) 543.
YU. I. KOSTENKO, N. N. KALINYUK, G. F. TORKHOV and YU. V. LATASH, Probl. Spets. Elektrometall.21 (1984) 74.
R. F. ABDULRAHMAN and A. HENDRY, Metallurigical and Materials Transactions B32B (2000) 1095.
The NBS tables of chemical thermodynamic propeties, J Phys. Chem. Ref. Data2(2) (1982).
K. O. SCHWEUTZ and S. E. MOHNEY, J. Electron. Mater.30 (2001) 175.
N. SAUNDERS and A. P. MIODOWNIK, “CALPHAD” PERGAMON (1998).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Yonemura, M., Kamei, K. & Munetoh, S. Precipitation of single crystalline AlN from Cu-Al-Ti solution under nitrogen atmosphere. J Mater Sci: Mater Electron 16, 197–201 (2005). https://doi.org/10.1007/s10854-005-0765-2
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/s10854-005-0765-2