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Mechanical behavior of surface-patterned and coated Si or Ge wafers for superhydrophobic and antireflective light transmitting windows

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Abstract

The compressive resistance of truncated nanocone lattices produced by lithography and etching steps on Si or Ge wafers to get superhydrophobic and antireflective light-transmitting windows, as well as the protection efficiency of alumina or diamond coatings, is investigated by numerical simulations of elastic buckling, and nanocompression tests. The latter reveal the limits of an elastic analysis, since the stress at the top of the cones is high enough to trigger plastic flow, or phase changes. Ge nano-cones exhibit a large ductility in compression and even seem to creep at room temperature. Thin alumina or diamond coatings are, however, shown to provide an effective protection against both buckling and plastic flow. Surface patterning is shown to induce stress concentrations at the foot of the cones, which reduces the fracture resistance of the substrate in biaxial bending.

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Acknowledgements

This work has been funded by the French National Research Agency (ANR) & DGA Defence Innovation Agency (AID) through the project ANR-18-ASTR-0021 "F-MARS" coordinated by Dr Gaelle Lehoucq and Dr Raphael Guillemet. The specimens were provided by Thales Research & Technology. The diamond coating was prepared by Dr Lionel Rousseau from ESIEE-Paris. The nano-compression tests were run at ICMPE laboratory, with the advice of Dr Mathilde Laurent-Brocq and the assistance of Philippe Chevallier. Dr Andrei Constantinescu’s advice concerning the finite element simulations is gratefully acknowledged.

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Authors and Affiliations

  1. CNRS UMR 7649, Laboratoire de Mécanique Des Solides, Ecole Polytechnique, Institut Polytechnique de Paris, Palaiseau, France

    Véronique Doquet, Alexandre Tanguy & Simon Hallais

  2. Thales Research & Technology-France, 1 avenue Augustin Fresnel, 91767, Palaiseau Cedex, France

    Raphaël Guillemet, Julie Cholet & Doriane Jussey

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  1. Véronique Doquet
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  2. Alexandre Tanguy
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Correspondence to Véronique Doquet.

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Doquet, V., Tanguy, A., Hallais, S. et al. Mechanical behavior of surface-patterned and coated Si or Ge wafers for superhydrophobic and antireflective light transmitting windows. J Mater Sci 57, 955–971 (2022). https://doi.org/10.1007/s10853-021-06794-1

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  • DOI: https://doi.org/10.1007/s10853-021-06794-1