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Substrate effects on the CVD growth of MoS2 and WS2

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Abstract

Chemical vapor deposition (CVD)-grown 2D materials like MoS2 and WS2 have been widely used for research and application. Here, we study substrates’ effects on CVD-grown MoS2 and WS2. The morphology, crystalline quality and optical properties have been modified while changing substrates, which can be derived from lattice matching between 2D materials and substrate, defect/impurities on the interface and conductance/transparency of different substrates. The results provide suggestion for further study in CVD growth of 2D materials and device fabrications.

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Acknowledgements

This work is supported by the National Natural Science Foundation of China (51701177, 51771170) and the Yunnan Applied Basic Research Project (2017FB080, 2018FB090).

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Authors and Affiliations

  1. School of Materials Science and Engineering, Yunnan Key Laboratory for Micro/Nano Materials and Technology, Yunnan University, Kunming, China

    Hang Yin, Xudong Zhang, Jiangwei Lu, Xuemin Geng, Yanfen Wan & Peng Yang

  2. School of Physics and Materials Science, Anhui University, Hefei, China

    Mingzai Wu

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  1. Hang Yin
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  2. Xudong Zhang
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  3. Jiangwei Lu
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  4. Xuemin Geng
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  5. Yanfen Wan
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  6. Mingzai Wu
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  7. Peng Yang
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Correspondence to Yanfen Wan, Mingzai Wu or Peng Yang.

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Yin, H., Zhang, X., Lu, J. et al. Substrate effects on the CVD growth of MoS2 and WS2. J Mater Sci 55, 990–996 (2020). https://doi.org/10.1007/s10853-019-03993-9

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  • DOI: https://doi.org/10.1007/s10853-019-03993-9

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