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Correlation of efficient luminescence with crystal structures of y-Er2Si2O7 and α-Er2Si2O7 in Er-doped silicon oxide films

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Abstract

We have investigated the fabrication and luminescent properties of different polymorphs of erbium (Er) silicate in Er-doped silicon oxide films. Silicon oxide films embedded with y-Er2Si2O7 and α-Er2Si2O7 layers have been fabricated with annealing at 1100 °C and 1150 °C, respectively. We demonstrate that y-Er2Si2O7 shows a stronger photoluminescence (PL) intensity, a longer PL lifetime, and a weaker PL thermal quenching effect than α-Er2Si2O7 due to the larger density of optically active Er ions, larger Er–Er average distance, higher symmetry, and stronger Er-O bonding. The Er lifetime–density product of y-Er2Si2O7 is as high as 3.5 × 1018 s cm−3 and is at least 2.4 times as large as that of α-Er2Si2O7 making y-Er2Si2O7 an excellent candidate for high optical gain.

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References

  1. Lesage A, Timmerman D, Lebrun DM, Fujiwara Y, Gregorkiewicz T (2018) Hot-carrier-mediated impact excitation of Er3+ ions in SiO2 sensitized by Si Nanocrystals. Appl Phys Lett 113:031109

    Article  Google Scholar 

  2. Fujii M, Imakita K, Watanabe K, Hayashi S (2004) Coexistence of two different energy transfer processes in SiO2 films containing Si nanocrystals and Er. J Appl Phys 95:272–280

    Article  Google Scholar 

  3. Fu Q, Gao Y, Li D, Yang D (2016) Sensitizing properties of luminescence centers on the emission of Er3+ in Si-rich SiO2 film. J Appl Phys 119:203106

    Article  Google Scholar 

  4. Xu L, Jin L, Li D, Yang D (2013) Effects of excess silicon on the 1540 nm Er3+ luminescence in silicon rich oxynitride films. Appl Phys Lett 103:071101

    Article  Google Scholar 

  5. Polman A (1997) Erbium implanted thin film photonic materials. J Appl Phys 82:1–39

    Article  Google Scholar 

  6. Miritello M, Lo Savio R, Iacona F, Franzò G, Irrera A, Piro AM, Bongiorno C, Priolo F (2007) Efficient luminescence and energy transfer in erbium silicate thin films. Adv Mater 19:1582–1588

    Article  Google Scholar 

  7. Sun H, Yin L, Liu Z, Zheng Y, Fan F, Zhao S, Feng X, Li Y, Ning CZ (2017) Giant optical gain in a single-crystal erbium chloride silicate nanowire. Nat Photon 11:589–593

    Article  Google Scholar 

  8. Shen H, Xu L, Li D, Yang D (2017) Sensitized photoluminescence of erbium silicate synthesized on porous silicon framework. J Appl Phys 122:113103

    Article  Google Scholar 

  9. Yin L, Ning H, Turkdogan S, Liu Z, Nichols PL, Ning CZ (2012) Long lifetime, high density single-crystal erbium compound nanowires as a high optical gain material. Appl Phys Lett 100:241905

    Article  Google Scholar 

  10. Masaki K, Isshiki H, Kimura T (2005) Erbium-Silicon-Oxide crystalline films prepared by MOMBE. Opt Mater 27:876–879

    Article  Google Scholar 

  11. Wang XJ, Nakajima T, Isshiki H, Kimura T (2009) Fabrication and characterization of Er silicates on SiO2/Si substrates. Appl Phys Lett 95:041906

    Article  Google Scholar 

  12. Díaz M, Pecharromán C, del Monte F, Sanz J, Iglesias JE, Moya JS, Yamagata C, Mello-Castanho S (2005) Synthesis, thermal evolution, and luminescence properties of yttrium disilicate host matrix. Chem Mater 17:1774–1782

    Article  Google Scholar 

  13. Felsche J (1973) The crystal chemistry of the rare-earth silicates. Struct Bonding 13:99–197

    Article  Google Scholar 

  14. Masaki K, Isshiki H, Kawaguchi T, Kimura T (2006) The effect of annealing conditions on the crystallization of Er–Si–O formed by solid phase reaction. Opt Mater 28:831–835

    Article  Google Scholar 

  15. Lo Savio R, Miritello M, Piro AM, Priolo F, Iacona F (2008) The influence of stoichiometry on the structural stability and on the optical emission of erbium silicate thin films. Appl Phys Lett 93:021919

    Article  Google Scholar 

  16. Gao Y, Shen H, Cao J, Li D, Yang D (2019) Control of the formation and luminescent properties of polymorphic erbium silicates on silicon. Opt Mater Express 9:1716–1727

    Article  Google Scholar 

  17. Shannon RD (1976) Revised effective ionic-radii and systematic studies of interatomic distances in halides and chalcogenides. Acta Crystallogr A 32:751–767

    Article  Google Scholar 

  18. Toropov NA, Galakhov FY, Konovalova SF (1961) Silicates of the rare earth elements communication 5. Phase diagrams of the Dy2O3-SiO2 and Er2O3-SiO2 systems. Russ Chem Bull 10:1271–1277

    Article  Google Scholar 

  19. Pellegrino P, Garrido B, Arbiol J, Garcia C, Lebour Y, Morante JR (2006) Site of Er ions in silica layers codoped with Si nanoclusters and Er. Appl Phys Lett 88:121915

    Article  Google Scholar 

  20. Beainy G, Frilay C, Pareige P, Gourbilleau F, Talbot E (2018) On the interplay between Si-Er-O segregation and erbium silicate (Er2Si2O7) formation in Er-doped SiOx thin films. J Alloys Compd 755:55–60

    Article  Google Scholar 

  21. Lu Y-W, Julsgaard B, Petersen MC, Jensen RVS, Pedersen TG, Pedersen K, Larsen AN (2010) Erbium diffusion in silicon dioxide. Appl Phys Lett 97:141903

    Article  Google Scholar 

  22. Felsche J (1970) Polymorphism and crystal data of the rare-earth disilicates of type R.E.2Si2O7. J Less-Common Met 21:1–14

    Article  Google Scholar 

  23. Batalieva NG, Pyatenko YA (1971) Artificial yttrialite (Y-Phase)-representative of a new structure type in rare-earth diorthosilicate series. Kristallografiya 16:905–910

    Google Scholar 

  24. Hartenbach I, Lissner F, Schleid T (2003) Crystal structure of B-type Tm2Si2O7 (≡ Tm4[Si3O10][SiO4]). Z Naturforsch B 58:925

    Article  Google Scholar 

  25. Garrido B, García C, Pellegrino P, Navarro-Urrios D, Daldosso N, Pavesi L, Gourbilleau F, Rizk R (2006) Distance dependent interaction as the limiting factor for Si nanocluster to Er energy transfer in silica. Appl Phys Lett 89:163103

    Article  Google Scholar 

  26. Garrido B, García C, Seo SY, Pellegrino P, Navarro-Urrios D, Daldosso N, Pavesi L, Gourbilleau F, Rizk R (2007) Excitable Er fraction and quenching phenomena in Er-doped SiO2 layers containing Si nanoclusters. Phys Rev B 76:245308

    Article  Google Scholar 

  27. Liu Y, Xu CN, Chen H, Tateyama H (2002) Influence of calcining temperature on photoluminescence and thermal quenching in europium-doped Y2SiO5 using the MOD process. J Lumin 97:135–140

    Article  Google Scholar 

  28. Dieke GH (1970) Spectra and energy levels of rare earth ions in crystals. Am J Phys 38:399–400

    Article  Google Scholar 

  29. Hijazi K, Rizk R, Cardin J, Khomenkova L, Gourbilleau F (2009) Towards an optimum coupling between Er ions and Si-based sensitizers for integrated active photonics. J Appl Phys 106:024311

    Article  Google Scholar 

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Acknowledgements

This work is supported by National Key R&D Program of China (2018YFB220025) and Natural Science Foundation of China (Nos. 61874095 and 61721005).

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Correspondence to Dongsheng Li or Deren Yang.

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Gao, Y., Fu, Q., Shen, H. et al. Correlation of efficient luminescence with crystal structures of y-Er2Si2O7 and α-Er2Si2O7 in Er-doped silicon oxide films. J Mater Sci 54, 12668–12675 (2019). https://doi.org/10.1007/s10853-019-03783-3

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