Abstract
We demonstrated a simple method of fabricating large-area, few-layer graphene that involves performing femtosecond pulsed laser deposition at a relatively low temperature of 500 °C and a high pressure of 10\(^{-5}\) Torr using a double-layer Ni catalyst. The average thickness of the resulting graphene films was less than 3 nm, their average area was more than 1 cm\(^{2}\), and their electrical resistivity was only 0.44 \({\rm m}\Omega .{\rm cm}\). The laser deposition process was also conducted at different laser energies, and it was observed that the quality of the few-layer graphene could be improved using a double-layer catalyst at a higher laser energy. The ejection of C clusters by breaking the C–C bonds of the HOPG through multi-photon ionization can explain the observed graphene formation characteristics. The insights may facilitate the controllable synthesis of large-area, mono-layer graphene and promote the commercialize application of the graphene.
Similar content being viewed by others
References
Geim AK (2009) Graphene: status and prospects. Science 324(5934):1530–1534
Novoselov KS, Geim AK, Morozov SV, Jiang D, Zhang Y, Dubonos SV, Grigorieva IV, Firsov AA (2004) Electric field effect in atomically thin carbon films. Science 306:666
Reina A, Jia X, Ho J, Nezich D, Son H, Bulovic V, Dresselhaus MS, Kong J (2009) Few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Lett. 9:30
Hemani GK, Vandenberghe WG, Brennan B, Chabal YJ, Walker AV, Wallace RM (2013) Interfacial graphene growth in the Ni/SiO2 system using pulsed laser deposition. Appl. Phys. Lett. 103:134102
Zhang H, Feng PX (2010) Fabrication and characterization of few-layer graphene. Carbon 48:359–364
Koh ATT, Foong YM, Chua DHC (2012) Comparison of the mechanism of low defect few-layer graphene fabricated on different metals by pulsed laser deposition. Diam Relat Mater 25:98–102
Koh ATT, Foong YM, Chua DHC (2010) Cooling rate and energy dependence of pulsed laser fabricated graphene on nickel at reduced temperature. Appl. Phys. Lett. 97:114102
Gaillard M, Boulmer-Leborgne C, Semmar N, Millon E, Petit A (2012) Carbon nanotube growth from metallic nanoparticles deposited by pulsed-laser deposition on different substrates. Appl Surf Sci 258:9237–9241
Kant KM, Reddy NM, Rama N, Sethupathi K, Rao MSR (2006) Electrical transport and morphological study of PLD-grown nanostructured amorphous carbon thin films. Nanotechnology 17:5244–5247
Johnson SL, Heimann PA, MacPhee AG, Lindenberg AM, Monteiro OR, Chang Z, Lee RW, Falcone RW (2005) Bonding in liquid carbon studied by time-resolved X-ray absorption spectroscopy. Phys Rev Lett 94:057407
Dong X, Liu S, Song H, Gu P, Li X (2015) Few-layer graphene film fabricated by femtosecond pulse laser deposition without catalytic layers. Chin Opt Lett 13(2):021601
Ferrari AC, Meyer JC, Scardaci V, Casiraghi C, Lazzeri M, Mauri F, Piscanec S, Jiang D, Novoselov KS, Roth S et al (2006) Raman spectrum of graphene and graphene layers. Phys Rev Lett 97:187401
Dresselhaus MS, Jorio A, Hofmann M, Dresselhaus G, Saito R (2010) Perspectives on carbon nanotubes and graphene Raman spectroscopy. Nano Lett 10:751
Kumar SRS, Alshareef HN (2013) Ultraviolet laser deposition of graphene thin films without catalytic layers. Appl Phys Lett 102:012110
Reina A, Jia X, Ho J, Nezich D, Son H, Bulovic V, Dresselhaus MS, Kong J (2009) Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Lett 9:30
Vlassiouk I, Smirnov SN, Ivanov I, Fulvio PF, Dai S, Meyer H, Chi MF, Datskos P, Lavrik NV (2011) Electrical and thermal conductivity of low temperature CVD graphene: the effect of disorder. Nanotechnology 22(27):275716
Houzumi S, Takeshima K, Mochiji K, Toyoda N, Yamada I (2008) Low-energy irradiation effects of gas cluster ion beams. Electron Commun Jpn 91:2
Ager JW, Anders S, Anders A, Wei B, Yao XY, Brown IG, Bhatia CS, Komvopoulos K (1999) Ion implantation post-processing of amorphous carbon films. Diam Relat Mater 8:451
Jeschke HO, Garcia ME, Bennemann KH (2001) Time-dependent energy absorption changes during ultrafast lattice deformation. Phys Rev Lett 87:015003
Copel M, Reuter MC, Kaxiras E, Tromp RM (1989) Surfactants in epitaxial growth. Phys Rev Lett 63:632–639
Acknowledgements
We gratefully acknowledge the support for this work from the National Natural Science Foundation of China (Grant No. 51275012)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Dong, X., Liu, S., Song, H. et al. Growth of large-area, few-layer graphene by femtosecond pulsed laser deposition with double-layer Ni catalyst. J Mater Sci 52, 2060–2065 (2017). https://doi.org/10.1007/s10853-016-0494-3
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10853-016-0494-3