Abstract
Diffusion of silver inner-electrode occurred during sintering of commercial low temperature co-fired glass ceramic substrate made the dielectric surface become light yellow. The samples added with silicon oxide (SiO2) powder, however, maintained white color. Silicon-oxide powder was used to modified the sintering behavior and inhibit the silver ions diffusion for the LTCC ceramics. The alumina particles in the LTCC substrates could be regarded as the diffusion barrier of silver ions. The activation energy for silver ions diffusion in the LTCC substrates was 101 kJ/mol. When 5 wt% SiO2 powder was added into the LTCC substrate, the diffusion activation energy of silver ions became 145 kJ/mol. At sintering temperature of 1180 K, the diffusion coefficient of silver ion in the LTCC ceramic substrates with and without additional SiO2 were 8.88 × 10−13 cm2/s and 1.08 × 10−12 cm2/s, respectively.
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Thelemann T, Thust H, Hintz M (2002) Microelectron Int 19:19
Dalaney K, Barrett J, Barton J, Doyle R (1999) IEEE Trans Adv Packaging 22:78
Watanabe T, Furutani K, Nakajima N, Mandai H (1999) In: Proceedings of IEEE international microwave symposium, Cambridge, 1999, p 215
Tang CW, Chang CY (2002) Electron Lett 38:801
Hsu RT, Jean JH (2005) J Am Ceram Soc 88:2429
Chang JC, Jean JH (2005) J Am Ceram Soc 88:1165
Doty RE, Vajo JJ (1995) In: Proceedings of international society for hybrid microelectronics, Reston, p 465
Prudenziti M, Morten B, Gualtieri AF, Leoni M (2004) J Mater Sci Mater Electron 15:447
Naguib HM, Laurin BK (1979) IEEE Trans CHMT 2:196
Jean JH, Chang JC (2004) J Am Ceram Soc 87:1287
Shim KB, Cho NT, Lee SW (2000) J Mater Sci 35:813. doi:https://doi.org/10.1023/A:1004769501698
Hsi CS, Hsieh FM, Chen HP (2007) J Eur Ceram Soc 27:2779
Waterhouse GIN, Bowmaker GA, Metson JB (2002) Surf Interface Anal 33:401
Waterhouse GIN, Bowmaker GA, Metson JB, Matter S (2001) Phys Chem Chem Phys 3:3838
Shewmon P (1975) In: Diffusion in solids. MacGraw-Hill, New York, 1975 p 12
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Hsi, CS., Chen, YR. & Hsiang, HI. Diffusivity of silver ions in the low temperature co-fired ceramic (LTCC) substrates. J Mater Sci 46, 4695–4700 (2011). https://doi.org/10.1007/s10853-011-5377-z
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DOI: https://doi.org/10.1007/s10853-011-5377-z