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Behavior of electrical resistance of SiCCVD fiber and development of micro-heater with SiCCVD fiber

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Abstract

Behavior of electrical resistance was examined in room temperature and elevated temperatures up to 1000 °C for two types of SiCCVD fibers with diameters of 140 and 70 μm, respectively. The results showed that electrical resistance showed a good linear relationship with the length of fibers. Electrical resistance decreased as temperature increased, besides, temperature coefficient of electrical resistance was a minus constant, −5.2 × 10−4 °C−1 except that in the first heating. In the first heating, electrical resistance and temperature coefficient increased and had a peak in the range of 550–700 °C owing to the burning of the carbon-rich layer on the fiber surface. It suggested that behavior of electrical resistance of the fibers depended mainly on the carbon core and the carbon-rich layer. It was confirmed that SiCCVD fiber could be used as heating elements for micro-heater and finally a micro-heater using SiCCVD fiber as heating elements was developed.

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Authors and Affiliations

  1. Graduate School, Faculty of Engineering, Chiba University, 1-33, Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan

    Yun Lu & Mitsuji Hirohashi

  2. Graduate School, Chiba University, 1-33, Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan

    Liang Hao

Authors
  1. Yun Lu
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  2. Liang Hao
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  3. Mitsuji Hirohashi
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Correspondence to Yun Lu.

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Lu, Y., Hao, L. & Hirohashi, M. Behavior of electrical resistance of SiCCVD fiber and development of micro-heater with SiCCVD fiber. J Mater Sci 46, 2085–2090 (2011). https://doi.org/10.1007/s10853-010-5042-y

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  • DOI: https://doi.org/10.1007/s10853-010-5042-y

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