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Microstructure and texture development in single layered and heterolayered PZT thin films

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Abstract

Single-layered Pb(Zr0.7Ti0.3)O3 and Pb(Zr0.3Ti0.7)O3 thin films and heterolayered Pb(Zr1−x Ti x )O3 thin films consisting of alternating Pb(Zr0.7Ti0.3)O3 and Pb(Zr0.3Ti0.7)O3 layers were studied for their microstructure and texture development. The texture in the single-layered PZT films is affected by the Zr/Ti ratio as they have different crystallization behavior depending on the Zr/Ti ratio. With increasing film thickness, the average grain size of Pb(Zr1−x Ti x )O3 increases. An unusually large grain size of 1–3 μm together with a strong (001)/(100) preferred orientation were observed for the heterolayered PZ70T30, whereby Pb(Zr0.7Ti0.3)O3 was used as the seeding layer, for film as thin as 150 nm. The film microstructure is refined drastically when the stacking sequence is changed, i.e., when Pb(Zr0.3Ti0.7)O3 is employed as the seeding layer. Thermal treatment of the PZ70T30 seeding layer also plays an important function in the microstructure development of the heterolayered PZ70T30 film. The formation of the large-grained film is correlated to the lowered nucleation energy of crystallizing Pb(Zr0.7Ti0.3)O3 by the top Pb(Zr0.3Ti0.7)O3. The Pb(Zr0.3Ti0.7)O3 layer facilitated the nucleation and crystallization of the Pb(Zr0.7Ti0.3)O3 amorphous seeding layer, whereby the overall microstructure of the heterolayered thin film was dictated by the Pb(Zr0.7Ti0.3)O3 seeding layer leading to the growth of larger PZT grains.

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Acknowledgements

This paper is based upon work supported by the Science and Engineering Research Council–A*Star, Singapore. Research at UNSW was supported by an Australian Research Council Discovery Project and UNSW Anthony Mason travel grant. The authors would like to thank Dr. Debbie Seng Hwee Leng, Mr. Tan Chee King, and Dr. Gregory Goh for their time and efforts on SIMS measurements, Ms. June Ong Lay Ting for her assistance in XPS measurements, and Dr. X. J. Lou for his time in discussion. The authors would like to acknowledge the support of National University of Singapore in this project.

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Authors and Affiliations

  1. Department of Materials Science and Engineering, Faculty of Engineering, National University of Singapore, Singapore, 117574, Singapore

    Fransiska Cecilia Kartawidjaja & John Wang

  2. School of Materials Science & Engineering, The University of New South Wales, Sydney, NSW, 2052, Australia

    Anbusathaiah Varatharajan & Nagarajan Valanoor

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  1. Fransiska Cecilia Kartawidjaja
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  2. Anbusathaiah Varatharajan
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  3. Nagarajan Valanoor
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  4. John Wang
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Correspondence to John Wang.

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Kartawidjaja, F.C., Varatharajan, A., Valanoor, N. et al. Microstructure and texture development in single layered and heterolayered PZT thin films. J Mater Sci 45, 6187–6199 (2010). https://doi.org/10.1007/s10853-010-4712-0

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  • DOI: https://doi.org/10.1007/s10853-010-4712-0

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