Skip to main content
Log in

Thermal stability and strength of Mo/Pt multilayered films

  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

The strength of Mo/Pt multilayers of varying thicknesses has been investigated using nanoindentation. Metallic composites with individual layer thicknesses ranging from 100 to 20 nm were fabricated. Of specific interest in this study was the strength of the nanocomposites after annealing in air at relatively high temperatures (475 °C) since potential applications involve high temperature and oxidizing environments. Annealing causes significant losses in strength, with the highest losses corresponding to the structures with the thinner Pt layers. Annealing caused grain coarsening as well as loss of the continuous interface between the individual layers when the Pt thickness was less than 35 nm. Oxidation of the Mo layers occurred during annealing, causing an increase in the thickness of the Mo containing layers. The oxidation of Mo occurs in a uniform manner which results in an increase of the total film thickness while the layered structure is maintained. Deconvolution of the Mo 3d spectrum from X-ray Photoelectron Spectroscopy revealed several oxide species, and no Pt–Mo intermetallics were detected. The changes in microstructure are related to the changes in mechanical properties. Films with thinner layer thicknesses were stronger prior to annealing; however, they showed larger losses in strength after the thermal treatment. Structures with thicker Pt layers should be used when the multilayers are exposed to elevated temperatures.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9

Similar content being viewed by others

References

  1. Misra A, Hirth JP, Kung H (2002) Philos Mag A 82:2935

    Article  CAS  Google Scholar 

  2. Was GS, Foecke T (1996) Thin Solid Films 286:1

    Article  CAS  Google Scholar 

  3. Misra A, Kung H (2001) Adv Eng Mater 3:217

    Article  CAS  Google Scholar 

  4. Misra A, Hirth JP, Hoagland RG (2005) Acta Mater 53:4817

    Article  CAS  Google Scholar 

  5. Lee HJ, Kwon KW, Ryu C, Sinclair R (1999) Acta Mater 47:3965

    Article  CAS  Google Scholar 

  6. Misra A, Hoagland RG (2005) J Mater Res 20:2046

    Article  CAS  Google Scholar 

  7. Misra A, Verdier M, Lu YC, Kung H, Mitchell TE, Nastasi M, Embury JD (1998) Scripta Mater 39:555

    Article  CAS  Google Scholar 

  8. McKeown J, Misra A, Kung H, Hoagland RG, Nastasi M (2002) Scripta Mater 46:593

    Article  CAS  Google Scholar 

  9. Huang H, Spaepen F (2000) Acta Mater 48:3261

    Article  CAS  Google Scholar 

  10. Eakins LMR, Olson BW, Richards CD, Richards RF, Bahr DF (2003) Thin Solid Films 441:180

    Article  CAS  Google Scholar 

  11. Morris DJ, Bahr DF, Anderson MJ (2008) Sens Actuators A 141:262

    Article  CAS  Google Scholar 

  12. Bonnotte E, Delobelle P, Bornier L, Trolard B, Tribillon G (1997) J Mater Res 12:2234

    Article  CAS  Google Scholar 

  13. Vlassak JJ, Nix WD (1992) J Mater Res 7:3242

    Article  CAS  Google Scholar 

  14. Massalski TB (1986) Binary alloy phase diagrams. American Society for Metals, Metals Park, OH

    Google Scholar 

  15. Underwood JH, Gullikson EM, Nguyen K (1993) Appl Opt 32:6985

    Article  CAS  Google Scholar 

  16. Werfel F, Minni E (1983) J Phys C: Solid State Phys 16:6091

    Article  CAS  Google Scholar 

  17. Barr TL (1978) J Phys Chem 82:1801

    Article  CAS  Google Scholar 

  18. Brox B, Olefjord L (1988) Surf Interface Anal 13:3

    Article  CAS  Google Scholar 

  19. Jaksic JM, Vracar Lj, Neophytides SG, Zafeiratos S, Papakonstantinou G, Krstajic NV, Jaksic MM (2005) Surf Sci 598:156

    Article  CAS  Google Scholar 

  20. Natesan K, Deevi SC (2000) Intermetallics 8:1147

    Article  CAS  Google Scholar 

  21. Geng DY, Zhang ZD, Zhang M, Li D, Song XP, Hu KY (2004) Scripta Mater 50:983

    Article  CAS  Google Scholar 

  22. Gulbransen EA, Andrew KF, Brassart FA (1963) J Electrochem Soc 110:952

    Article  CAS  Google Scholar 

  23. Misra A, Verdier M, Kung H, Embury JD, Hirth JP (1999) Scripta Mater 41:973

    Article  CAS  Google Scholar 

Download references

Acknowledgement

This work was supported in part by the US Department of Energy under Grant number DE-FG02-07ER4635.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to D. F. Bahr.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bellou, A., Scudiero, L. & Bahr, D.F. Thermal stability and strength of Mo/Pt multilayered films. J Mater Sci 45, 354–362 (2010). https://doi.org/10.1007/s10853-009-3943-4

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10853-009-3943-4

Keywords

Navigation