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A new method to experimentally determine the thermal expansion coefficient, Poisson’s ratio and Young’s modulus of thin films

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Acknowledgement

This work was performed in the Engineering Physics Department at Ecole Polytechnique of Montreal, Canada. The author would like to thank Prof. S. Goldsmith and Prof. R.L Boxman for a critical reading of the manuscript and helpful discussions.

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Correspondence to E. Çetinörgü.

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Çetinörgü, E. A new method to experimentally determine the thermal expansion coefficient, Poisson’s ratio and Young’s modulus of thin films. J Mater Sci 44, 2167–2170 (2009). https://doi.org/10.1007/s10853-009-3365-3

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  • DOI: https://doi.org/10.1007/s10853-009-3365-3

Keywords

  • Thermal Expansion Coefficient
  • Niobium Oxide
  • Intrinsic Stress
  • Tantalum Oxide
  • Film Stress