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Effect of SmFe and TbFe film thickness on magnetostriction for MEMS devices

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Acknowledgement

This research was supported by the University IT Research Center Project.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Inha University, 253 Yonghyun-dong, Nam-gu, Incheon, 402751, South Korea

    Heung-Shik Lee & Chongdu Cho

  2. Department of Electronic Engineering, Inha University, Incheon, South Korea

    Sung-Pil Chang

Authors
  1. Heung-Shik Lee
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  2. Chongdu Cho
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  3. Sung-Pil Chang
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Corresponding author

Correspondence to Chongdu Cho.

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Lee, HS., Cho, C. & Chang, SP. Effect of SmFe and TbFe film thickness on magnetostriction for MEMS devices. J Mater Sci 42, 384–388 (2007). https://doi.org/10.1007/s10853-006-1183-4

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  • DOI: https://doi.org/10.1007/s10853-006-1183-4

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