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Journal of Materials Science

, Volume 42, Issue 13, pp 4845–4849 | Cite as

Dependence of the resistivity and the transmittance of sputter-deposited Ga-doped ZnO films on oxygen partial pressure and sputtering temperature

  • Sookjoo Kim
  • Wan In Lee
  • El-Hang Lee
  • S. K. Hwang
  • Chongmu LeeEmail author
Article

Abstract

Ga-doped ZnO (GZO) thin films were prepared by rf magnetron sputtering and dependence of the electrical resistivity and the transmittance of the GZO films on the oxygen partial pressure (R = the O2/Ar gas flow ratio) and the substrate temperature were investigated. The resistivity of the GZO film decreases first and then increases with an increase in the substrate temperature (T). A minimum resistivity obtained with a substrate temperature of 300 °C is 3.3 × 10−4 Ωcm. The resistivity nearly does not change with R for R < 0.25. The decrease in the resistivity for R < 0.25 is attributed to enhancement in crystallinity, whereas the increase in the resistivity for R > 0.25 to precipitation of gallium oxides at grain boundaries. Optical transmittance of the GZO films is enhanced by increasing R up to 0.75. This enhancement in the transmittance is due to a decrease in oxygen vacancy concentration and a decrease in surface roughness with R.

Keywords

Electrical Resistivity Substrate Temperature Carrier Concentration Oxygen Partial Pressure Gallium Oxide 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgements

This work was supported by KOSEF through OPERA (R11-2003-022).

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Copyright information

© Springer Science+Business Media, LLC 2007

Authors and Affiliations

  • Sookjoo Kim
    • 1
  • Wan In Lee
    • 2
  • El-Hang Lee
    • 3
  • S. K. Hwang
    • 1
  • Chongmu Lee
    • 1
    Email author
  1. 1.Department of Materials Science and EngineeringInha UniversityIncheonKorea
  2. 2.Department of ChemistryInha UniversityIncheonKorea
  3. 3.OPERAInha UniversityIncheonKorea

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