Skip to main content
SpringerLink
Log in

Surface and interface characteristics of SiC coatings by chemical vapor deposition

  • Published:
Journal of Materials Science Aims and scope Submit manuscript

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. XIN-BO HE and XIN-MING ZHANG, J. Mater. Sci. Lett. 19 (2000) 417.

    Google Scholar 

  2. T. KLEPS and A. ANGELESCU, Appl. Surf. Sci. 184 (2001) 107.

    Google Scholar 

  3. THOMSA B. PARSONAGE, et al., SPIE. 1335 (1990) 119.

    Google Scholar 

  4. HOTATE, et al., US Patent. no. 5,448,418 (Sept. 1995).

  5. J. H. OH and D. J. CHOI, J. Mater. Sci. Lett. 19 (2000) 2043.

    Google Scholar 

  6. Y. XU, L. CHENG, L. ZHANG and W. ZHOU, J. Mater, Sci. 34 (1999) 551.

    Google Scholar 

  7. J. ZIJUN and KLAUS J. HUTTINGER, Chem. Vap. Deposition 6 (2000) 77.

    Google Scholar 

  8. WEIGANG G. ZHANG and KLAUS J. HUTTINGER, ibid. 7 (2001) 173.

    Google Scholar 

  9. T. KANEKO and T. OKUNO, J. Cryst. Growth 91 (1988) 599.

    Google Scholar 

  10. JUNG-HWAN OH, BYUNG-JUN OH and DOO-JIN CHOI, J. Mater. Sci. 36 (2001) 1695.

    Google Scholar 

  11. RONG-JUN LIU and CHANG-RUI ZHANG, J. Mater. Sci. Lett. 22 (2003) 841.

    Google Scholar 

  12. HAN-SU KIM and DOO-JIN CHOI, J. Amer. Ceram. Soc. 82 (1999) 331.

    Google Scholar 

  13. CHING YI TSAI and SESHU B. DESU, J. Mater. Res. 9 (1994) 104.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Key Laboratory of Advanced Fibers & Composites, College of Aerospace & Materials Engineering, National University of Defense Technology, Chang sha, 410073, People’s Republic of China

    Rong-Jun Liu, Chang-Rui Zhang, Xiao-Yang Liu, Xin-Gui Zhou & Ying-Bin Cao

Authors
  1. Rong-Jun Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Chang-Rui Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Xiao-Yang Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Xin-Gui Zhou
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Ying-Bin Cao
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Rong-Jun Liu.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Liu, RJ., Zhang, CR., Liu, XY. et al. Surface and interface characteristics of SiC coatings by chemical vapor deposition. J Mater Sci 40, 2109–2111 (2005). https://doi.org/10.1007/s10853-005-1248-9

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10853-005-1248-9

Keywords

Search

Navigation