A Piezoelectric-Metal-Cavity (PMC) actuator
- 133 Downloads
A novel piezoelectric-metal-cavity (PMC) actuator has been designed to exhibit a large flexural displacement. This PMC actuator consists of a metal ring sandwiched between two identical piezoelectric unimorphs. The radial contraction of the piezoelectric ceramic is converted into flextensional motion of the unimorph, causing a large flexural displacement in the centre part of the actuator. The metal cavity acts a function of circumferential coupling of the piezoelectric unimorphs. It was found that the effective piezoelectric charge coefficient of the PMC actuator can approach 40,000 pC/N. With its high piezoelectric and electromechanical coupling coefficients, the PMC actuator gives a static displacement 16 μm can be produced under a d.c. driving voltage of ±77 V.
KeywordsPiezoelectric Actuator Unimorph
This work was supported by the Centre for Smart Materials of the Hong Kong Polytechnic University.
- 1.K. Uchino, Piezoelectric Actuators and Ultrasonic Motors (Kluwer Academic Publishers, Boston, 1997)Google Scholar
- 3.Q.C. Xu, A. Dogan, J. Tressler, S. Yoshikawa, R.E. Newnham, Proceedings of IEEE Ultrasonic Symposium 2, 923 (1991)Google Scholar
- 5.R.E. Newnham, A. Dogan, Q.C. Xu, K. Onitsuka, J. Tressler, S. Yoshikawa, Proceedings of IEEE Ultrasonic Symposium 1, 509 (1993)Google Scholar
- 11.IEEE Standard on Piezoelectricity, ANSI/IEEE Std. 176 (1987)Google Scholar