Abstract
We have developed an analytical model for use in design and modelling of piezoelectric MEMS devices. The model allows for incorporation of any number of device material layers in a multimorph structure including piezoelectric materials. The resulting lumped circuit model fully incorporates the electro-mechanical coupling effects in the piezoelectric layers as well as electrical or mechanical loading of the device structure. Since the model is analytic, and only requires the specification of well-defined material properties, it allows for fast and interactive modelling of a multitude of MEMS device structures incorporating piezoelectric materials. We will demonstrate the capability of the model by presenting results from fitting the model to impedance measurements performed on cantilever structures. This allows for extraction of device and material parameters that are difficult to obtain by other means, such as the piezoelectric coefficient and the mechanical quality factor.
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Acknowledgements
The authors acknowledge the support from the European Commission through the MEMS-pie project (Contract no. COOP-CT-2004-508219) [http://www.sintef.no/mems-pie] and contributions from the companies involved: aixACCT Systems GmbH (DE), Hök Instrument AB (SE), Noliac A/S (DK), Precision Acoustics Ltd. (UK) and Sonitor AS (NO).
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Booij, W.E., Vogl, A.H., Wang, D.T. et al. A simple and powerful analytical model for MEMS piezoelectric multimorphs. J Electroceram 19, 387–393 (2007). https://doi.org/10.1007/s10832-007-9034-5
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DOI: https://doi.org/10.1007/s10832-007-9034-5