Abstract
Recent progress in oxide-based transparent optoelectronic devices is reviewed. It is important to understand electronic structures inherent to oxides in order to develop new materials and to find suitable device applications that oxide materials can have distinct advantages over conventional semiconductors. Two new transparent oxide semiconductors, (i) p-type layered oxychalcogenides LaCuOCh (Ch = chalcogen), and (ii) large-mobility amorphous oxide semiconductors (AOSs), are taken as examples. Their peculiar properties are discussed in comparison with conventional semiconductors based on consideration of electronic structures. Two associated devices, an excitonic light-emitting diode using LaCuOCh and transparent flexible thin film transistors using AOSs, are also shown.
Similar content being viewed by others
References
H. Kawazoe, M. Yasukawa, H. Hyodo, M. Kurita, H. Yanagi, and H. Hosono, Nature, 389, 939 (1997).
A. Ohtomo and A. Tsukazaki, Semicond. Sci. Technol., 20, S1 (2005).
D.C. Look, Semicond. Sci. Technol., 20, S55 (2005).
T. Makino, Y. Segawa, M. Kawasaki, and H. Koinuma, Semicond. Sci. Technol., 20, S78 (2005).
Y. Tokura, Physics Today, 50 (2003).
H. Hosono, T. Kamiya, and M. Hirano, Bull. Chem. Soc. Jpn., 79, 1 (2006).
T. Kamiya and H. Hosono, Semicond. Sci. Technol., 20, S92 (2005).
H. Hosono, Int. J. Appl. Ceram. Technol, 1, 106 (2004).
H. Ohta and H. Hosono, Materials Today, Jun, 42 (2004).
H. Ohta, K. Kawamura, M. Orita, M. Hirano, N. Sarukura, and H. Hosono, Appl. Phys. Lett., 77, 475 (2000).
H. Ohta, M. Orita, M. Hirano, and H. Hosono, J. Appl. Phys., 89, 5720 (2001).
K. Nomura, H. Ohta, K. Ueda, T. Kamiya, M. Hirano, and H. Hosono, Science, 300, 1269 (2003).
M. Orita, H. Ohta, M. Hirano, and H. Hosono, Appl. Phys. Lett., 77, 4166 (2000).
M. Orita, H. Hiramatsu, H. Ohta, M. Hirano, and H. Hosono, Thin Solid Films, 411, 134 (2002).
K. Matsuzaki, H. Yanagi, T. Kamiya, H. Hiramatsu, K. Nomura, M. Hirano, and H. Hosono, Appl. Phys. Lett., 88, 092106 (2006).
M. Oto, S. Kikugawa, N. Sarukura, M. Hirano, and H. Hosono, IEEE Photon. Technol. Lett., 13, 978 (2001).
M. Oto, S. Kikugawa, T. Miura, M. Hirano, and H. Hosono, J. Non-Cryst. Sol., 349, 133 (2004).
K. Hayashi, M. Hirano, S. Matsuishi, and H. Hosono, J. Am. Chem. Soc., 124, 738 (2002).
K. Hayashi, S. Matsuishi, T. Kamiya, M. Hirano, and H. Hosono, Nature, 419, 462 (2002).
S. Matsuishi, Y. Toda, M. Miyakawa, K. Hayashi, T. Kamiya, M. Hirano, I. Tanaka, and H. Hosono, Science, 301, 626 (2003).
Y. Toda, S. Matsuishi, K. Hayashi, K. Ueda, T. Kamiya, M. Hirano, and H. Hosono, Adv. Mater., 16, 685 (2004).
Y. Toda, S.W. Kim, K. Hayashi, M. Hirano, T. Kamiya, H. Hosono, T. Haraguchi, and H. Yasuda, Appl. Phys. Lett., 87, 254103 (2005).
T. Kamiya, S. Aiba, M. Miyakawa, K. Nomura, S. Matsuishi, K. Hayashi, K. Ueda, M. Hirano, and H. Hosono, Chem. Mater., 17, 6311 (2005).
T. Kamiya and H. Hosono, Jpn. J. Appl. Phys., 44, 774 (2005).
T. Kamiya, H. Ohta, H. Hiramatsu, K. Hayashi, K. Nomura, S. Matsuishi, K. Ueda, M. Hirano, and H. Hosono, Microelectr. Eng., 73–74, 620 (2004).
W.E. Spear and P.G. LeComber, Solid State Commun., 17, 1193 (1975).
W.E. Spear, G. Willeke, and P.G. LeComber, Physica B, 117–118, 908 (1983).
S. Narushima, K. Ueda, H. Mizoguchi, H. Ohta, M. Hirano, K. Shimizu, T. Kamiya, and H. Hosono, Adv. Mater., 15, 1409 (2003).
T. Kamiya, S. Narushima, H. Mizoguchi, K. Shimizu, K. Ueda, H. Ohta, M. Hirano, and H. Hosono, Adv. Funct. Mater., 15, 968 (2005).
E.M.C. Fortunato, P.M.C. Barquinha, A.C.M.B.G. Pimentel, A.M.F. Gonçalves, A.J.S. Marques, R.F.P. Martins, and L.M.N. Pereira, Appl. Phys. Lett., 85, 2541 (2004).
E.M.C. Fortunato, P.M.C. Barquinha, A.C.M.B.G. Pimentel, A.M.F. Concalves, A.J.S. Marques, L.M.N. Perera, and R.F.P. Martins, Adv. Mater., 17, 590 (2005).
H. Hosono, J. Cryst. Growth, 237–239, 496 (2002).
A. Tsukazaki, A. Ohtomo, T. Onuma, M. Ohtani, T. Makino, M. Sumiya, K. Ohtani, Su.F. Chichibu, S. Fuke, Y. Segawa, H. Ohno, H. Koinuma, and M. Kawasak, Nature Mater., 4, 42 (2004).
S. Krishnamoorthy, A.A. Iliadis, A. Inumpudi, S. Choopun, R.D. Vispute, and T. Venkatesan, Sol. Stat. Electr., 46, 1633 (2002).
T. Edahiro, N. Fujimura, and T. Ito, J. Appl. Phys., 93, 7673 (2003).
K. Ueda, K. Takafuji, H. Hiramatsu, H. Ohta, M. Hirano, H. Hosono, and H. Kawazoe, Mater. Res. Soc. Symp. Proc., 747, 223 (2003).
H. Hiramatsu, K. Ueda, H. Ohta, M. Hirano, T. Kamiya, and H. Hosono, Appl. Phys. Lett., 82, 1048 (2003).
H. Hiramatsu, K. Ueda, K. Takafuji, H. Ohta, M. Hirano, T. Kamiya, and H. Hosono, J. Appl. Phys., 94, 5805 (2003).
H. Hiramatsu, K. Ueda, T. Kamiya, H. Ohta, M. Hirano, and H. Hosono, J. Phys. Chem. B, 108, 17344 (2004).
K. Ueda, H. Hiramatsu, H. Ohta, M. Hirano, T. Kamiya, and H. Hosono, Phys. Rev. B, 69, 155305 (2004).
e.g., A. Shink, Quantum Wells (World Scientific, Singapore, 1997).
H. Kamioka, H. Hiramatsu, H. Ohta, M. Hirano, K. Ueda, T. Kamiya, and H. Hosono, Appl. Phys. Lett., 84, 879 (2004).
H. Kamioka, H. Hiramatsu, M. Hirano, K. Ueda, T. Kamiya, and H. Hosono, Opt. Lett., 29, 1659 (2004).
H. Hiramatsu, K. Ueda, H. Ohta, M. Hirano, T. Kamiya, and H. Hosono, Thin Solid Films, 445, 304 (2003).
S. Inoue, K. Ueda, and H. Hosono, Phys. Rev. B, 64, 245211 (2001).
T. Kamiya, K. Ueda, H. Hiramatsu, H. Kamioka, H. Ohta, M. Hirano, and H. Hosono, Thin Solid Films, 486, 98 (2005).
Semiconductors: Data Handbook, 3rd edn., (Springer), pp. 454–457, (ISBN 3-540-40488-0).
H. Hiramatsu, K. Ueda, H. Ohta, T. Kamiya, M. Hirano, and H. Hosono, Appl. Phys. Lett., 87, 211107 (2005).
H. Ohta, K. Nomura, M. Orita, M. Hirano, K. Ueda, T. Suzuki, Y. Ikuhara, and H. Hosono, Adv. Funct. Mater., 13, 139 (2003).
K. Nomura, H. Ohta, T. Suzuki, C. Honjyo, K. Ueda, T. Kamiya, M. Orita, Y. Ikuhara, M. Hirano, and H. Hosono, J. Appl. Phys., 95, 5532 (2004).
S. Masuda, K. Kitamura, Y. Okumura, S. Miyatake, H. Tabata, and T. Kawai, J. Appl. Phys., 93, 1624 (2003).
J. Nishii, F.M. Hossain, S. Takagi, T. Aita, K. Saikusa, Y. Ohmaki, I. Ohkubo, S. Kishimoto, A. Ohtomo, T. Fukumura, F. Matsukura, Y. Ohno, H. Koinuma, H. Ohno, and M. Kawasaki, Jpn. J. Appl. Phys., 42, L347 (2003).
T. Sameshima, J. Non-Cryst. Solids, 227–230, 1196 (1998).
H. Hosono, N. Kikuchi, N. Ueda, and H. Kawazoe, J. Non-Cryst. Solids, 198–200, 165 (1996).
H. Hosono, M. Yasukawa, and H. Kawazoe, J. Non-Cryst. Solids, 203, 334 (1996).
K. Nomura, A. Takagi, T. Kamiya, H. Ohta, M. Hirano, and H. Hosono, Jpn. J. Appl. Phys., (2005) in print.
K. Nomura, H. Ohta, K. Ueda, T. Kamiya, M. Hirano, and H. Hosono, Appl. Phys. Lett., 85, 1993 (2004).
A. Takagi, K. Nomura, H. Ohta, H. Yanagi, T. Kamiya, M. Hirano, and H. Hosono, Thin Solid Films, 486, 38 (2005).
K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature, 432, 488 (2004).
F. Agullo-Lopez, C.R.A. Catlow, and P.D. Townsend, Point Defects in Materials (Academic Press, London, 1988).
A.F. Kohan, G. Ceder, D. Morgan, and C.G.V. Walle, Phys. Rev. B, 61, 15019 (2000).
F. Oba, S.R. Nishitani, S. Isotani, H. Adachi, and I. Tanaka, J. Appl. Phys., 90, 824 (2001).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Kamiya, T., Hiramatsu, H., Nomura, K. et al. Device applications of transparent oxide semiconductors: Excitonic blue LED and transparent flexible TFT. J Electroceram 17, 267–275 (2006). https://doi.org/10.1007/s10832-006-6710-9
Received:
Revised:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/s10832-006-6710-9