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Phase Decomposition and Dielectric Properties of Reactively Sputtered Bismuth Zinc Niobate Pyrochlore Thin Films Deposited from Monoclinic Zirconolite Target

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Abstract

Thin films of Bi2O3-ZnO-Nb2O5 system with cubic pyrochlore structure can be deposited using both cubic and monoclinic (zirconolite) targets. When monoclinic target was used, the as-deposited phase was nonequilibrium cubic monophase. After post-annealing in the 600–800^∘C range, phase decomposition occurred, resulting in more thermodynamically stable cubic pyrochlore and monoclinic zirconolite phases. The dielectric properties, such as dielectric constant and electric field dependent tunability, showed a steep increase along with phase separation. However, dielectric loss had a reverse tendency. The maximum tunability was about 38%, which exceeds that of cubic pyrochlore monophase films deposited from cubic target.

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Ko, K.H., Back, D.H., Hong, Y.P. et al. Phase Decomposition and Dielectric Properties of Reactively Sputtered Bismuth Zinc Niobate Pyrochlore Thin Films Deposited from Monoclinic Zirconolite Target. J Electroceram 14, 171–175 (2005). https://doi.org/10.1007/s10832-005-0955-6

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  • DOI: https://doi.org/10.1007/s10832-005-0955-6

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