Abstract
Thin films of Bi2O3-ZnO-Nb2O5 system with cubic pyrochlore structure can be deposited using both cubic and monoclinic (zirconolite) targets. When monoclinic target was used, the as-deposited phase was nonequilibrium cubic monophase. After post-annealing in the 600–800^∘C range, phase decomposition occurred, resulting in more thermodynamically stable cubic pyrochlore and monoclinic zirconolite phases. The dielectric properties, such as dielectric constant and electric field dependent tunability, showed a steep increase along with phase separation. However, dielectric loss had a reverse tendency. The maximum tunability was about 38%, which exceeds that of cubic pyrochlore monophase films deposited from cubic target.
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N. Navi, H. Kim, J.S. Horwitz, H.D. Wu, and S.B. Qadri, Appl. Phys. A, 76, 841 (2003).
X.X. Xi, H.-C. Li, W. Si, A.A. Sirenko, I.A. Akimov, J.R. Fox, A.M. Clark, and J. Hao, J. Electroceram., 4, 393 (2000).
W.J. Kim, W. Chang, S.B. Qadri, H.D. Wu, J.M. Pond, S.W. Kirchoefer, H.S. Newman, D.B. Chrisey, and J.S. Horwitz, Appl. Phys. A, 71, 7 (2000).
L.C. Sengupta and S. Sengupta, Mat. Res. Innovat., 2, 278 (1999).
P. Padmini, T.R. Taylor, M.J. Lefevre, A.S. Nagra, R.A. York, and J. S. Speck, Appl. Phys. Lett., 75, 3186 (1999).
D. Fuchs, C.W. Schneider, R. Schneider, and H. Rietschel, J. Appl. Phys., 85, 7362 (1999).
A.B. Kozyrev, T.B. Samoilova, A.A. Golovkov, E.K. Hollmann, D.A. Kalinikos, V.E. Loginov, A.M. Prudan, O.I. Soldatenkov, D. Galt, C.H. Mueller, T.V. Rivkin, and G.A. Koepf, J. Appl. Phys., 84, 3326 (1998).
H.-M. Christen, L.A. Knauss, and K.S. Harshavardhan, Materials Science and Engineering, B56, 200 (1998).
A. Outzourhit, J.U. Trefny, T. Kito, B. Yarar, A. Naziripour, and A.M. Herman, Thin Solid Films, 259, 218 (1995).
I. Levin, T.G. Amos, J.C. Nino, T.A. Vanderah, C.A. Randall, and M.T. Langana, J. Solid State Chem., 168, 69 (2002).
I. Levin, T.G. Amos, J.C. Nino, T.A. Vanderah, I.M. Reaney, C.A. Randall, and M.T. Lanagan, J. Mater. Res., 17, 1406 (2002).
W. Ren, S. Trolier-McKinstry, C.A. Randall, and T.R. Shrout, J. Appl. Phys., 89, 767 (2001).
W. Ren, R. Thayer, C.A. Randall, T.R. Shrout, and S. Trolier-McKinstry, Mater. Res. Soc. Symp. Proc., 603, 137 (2000).
R.L. Thayer, C.A. Randall, and S. Trolier-Mckinstry, J. Appl. Phys., 94, 1941 (2003).
Y.C. Chen, H.F. Cheng, Y.M. Tasu, P. Kuzel, J. Petzelt, and I.N. Lin, J. Eur. Ceram. Soc., 21, 2731 (2001).
H.F. Cheng, Y.C. Chen, and I.N. Lin, J. Appl. Phys., 87, 479 (2000).
Y. P. Hong, S. Ha, H.Y. Lee, Y.C. Lee, K.H. Ko, D.W. Kim, H.B. Hong, and K.S. Hong, Thin Solid Films, 419, 183 (2002).
S. Ha, Y.S. Lee, Y.P. Hong, H.Y. Lee, Y.C. Lee, K.H. Ko, D.W. Kim, H.B. Hong, and K.S. Hong, Appl. Phys. A, 80, 585 (2005).
J. Lu, Z. Chen, T.R. Taylor, and S. Stemmer, J. Vac. Sci. Technol., A21(5), 1745 (2003).
S.Y. Chen, S.Y. Lee, and T.J. Lin, J. Euro. Ceram. Soc., 23, 873 (2003).
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Ko, K.H., Back, D.H., Hong, Y.P. et al. Phase Decomposition and Dielectric Properties of Reactively Sputtered Bismuth Zinc Niobate Pyrochlore Thin Films Deposited from Monoclinic Zirconolite Target. J Electroceram 14, 171–175 (2005). https://doi.org/10.1007/s10832-005-0955-6
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DOI: https://doi.org/10.1007/s10832-005-0955-6