Abstract
Equivalent circuit model for micro-torsion mirror using open-source circuit simulator is reported, which gives a convenient technique for the design of circuits with electrostatic actuators. In the simulation, linear equations for electrical system, mechanical system, and transducer between both systems are considered. Mathematical operations of these equations are interrupted as appropriate circuits, so that a seamless multi-physics mixed simulation becomes possible.
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Matsuda, K. Equivalent-circuit model for electrostatic micro-torsion mirror. J Comput Electron 10, 136–140 (2011). https://doi.org/10.1007/s10825-011-0353-z
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DOI: https://doi.org/10.1007/s10825-011-0353-z