Abstract
This paper describes the impact of surface roughness related body thickness fluctuations on the mobility in double gate MOSFETs. The analysis combines 3D drift diffusion simulations with density gradient quantum corrections and ensemble Monte Carlo simulations, which include, in an ab initio fashion, the additional scattering associated with the variation in the quantum mechanical confinement along the channel. Results for a range of devices with varying silicon thicknesses and both smooth and rough interfaces are presented in order to demonstrate the impact of this additional scattering mechanism on the mobility in the channel.
Similar content being viewed by others
References
D. Esseni, M. Mastrapasqua, C. Fiegna, G.K. Celler, L. Selmi, and E. Sangiorgi, “An experimental study of low field electron mobility in double-gate, ultra-thin SOI MOSFETs,” IEDM Technical Digest, 445 (2001).
D. Hisamoto, “FD/DG-SOI MOSFET—a viable approach to overcoming the device scaling limit,” IEDM Technical Digest, 429 (2001).
Z. Ren, R. Venugopal, S. Datta, and M. Lundstrom, “Examination of design and manufacturing issues in a 10 nm Double Gate MOSFET using Nonequilibrium Green’s Function Simulation,” IEDM Technical Digest, 107 (2001).
T. Ernst, S. Cristoloveanu, G. Ghibaudo, T. Ouisse, S. Horiguchi, Y. Ono, Y. Takahashi, and K. Murase, “Ultimately thin double-gate SOI MOSFETs,” IEEE Trans. Electron Dev., 50(3), 830 (2003).
D. Esseni, A. Adramo, L. Selmi, and E. Sangiorgi, “Physically based modeling of low field electron mobility in ultrathin single- and double-gate SOI n-MOSFETs,” IEEE Trans. Electron Dev., 50(12), 2445 (2003).
D. Esseni, A. Abramo, L. Selmi, and E. Sangiorgi, “Study of low field electron transport in ultra-thin single and double gate SOI MOSFETs,” IEDM Technical Digest, 719 (2002).
K. Uchida, H. Watanabe, A. Kinoshita, J. Koga, T. Numata, and S. Takagi, “Experimental study on carrier transport mechanism in ultrathin-body SOI n- and p-MOSFETs with SOI thickness less than 5 nm,” IEDM Technical Digest, 47 (2002).
M.G. Ancona and G.J. Iafrate, “Quantum correction to the equation of state of an electron gas in a semiconductor,” Phys. Rev. B, 39(13), 9536 (1989).
A.R. Brown, F. Adamu-Lema, and A. Asenov, “Intrinsic parameter fluctuations in nanometre scale thin body SOI devices introduced by interface roughness,” Superlattices and Microstructures, 34, 283 (2003).
S.E. Laux, “On particle-mesh coupling in Monte-Carlo semiconductor device simulation,” IEEE Trans. CAD of Integrated Circuits and Systems, 15(10), 1266 (1996).
A. Asenov, A.R. Brown, J.H. Davies, and S. Saini, “Hierarchical approach to “Atomistic” 3-D MOSFET Simulation,” IEEE Trans. CAD of Integrated Circuits and Systems, 18(11), 1558 (1999).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Riddet, C., Brown, A.R., Alexander, C. et al. Scattering from Body Thickness Fluctuations in Double Gate MOSFETs: An ab initio Monte Carlo Simulation Study. J Comput Electron 3, 341–345 (2004). https://doi.org/10.1007/s10825-004-7073-6
Issue Date:
DOI: https://doi.org/10.1007/s10825-004-7073-6