Plasma Parameters Near a Hollow Rectangular Cathode

A single probe method is used to obtain the electron density and electron energy distribution function in a short discharge gap between a rectangular hollow cathode and a mesh anode. It is found that the electron distributions are non-Maxwellian and have an excess of high-energy electrons, the fraction of which decreases with distance from the cathode.

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Correspondence to A. V. Bernatskiy.

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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 88, No. 2, pp. 227–230, March–April, 2021.

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Andreev, S.N., Bernatskiy, A.V. & Ochkin, V.N. Plasma Parameters Near a Hollow Rectangular Cathode. J Appl Spectrosc 88, 289–292 (2021). https://doi.org/10.1007/s10812-021-01171-x

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Keywords

  • low-temperature plasma
  • electron energy distribution function
  • hollow cathode