A proposed model of an effective medium in which a Maxwell–Garnett matrix medium is filled with a Bruggeman medium is used to solve inverse problems of multi-angle ellipsometry to determine the composition of transition layers surrounding a layer of thermal silicon dioxide on a silicon substrate. The volume filling factors of the layer reflect correctly possible structural transformations during the oxidation of crystalline silicon.
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Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 84, No. 5, pp. 703–709, September–October, 2017.
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Staskov, N.I., Sotskaya, L.I. Three-Component Model of an Effective Medium for Determining the Composition of Layers on Silicon Wafers. J Appl Spectrosc 84, 764–769 (2017). https://doi.org/10.1007/s10812-017-0542-z
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DOI: https://doi.org/10.1007/s10812-017-0542-z