Abstract
We have demonstrated the effectiveness of Raman spectroscopy for monitoring nickel silicide formation processes on the surface of silicon wafers, with deposition of a composite metal layer (nickel, platinum, and vanadium) under industrial process conditions in microelectronics. The observed shift of all the NiSi lines toward lower energies is associated with formation of the metastable silicide phase Ni1−x Pt x Si, which leads to the presence of stresses in the lattice as a result of the increase in the distances between atoms.
Similar content being viewed by others
References
P. S. Lee, K. L. Pey, D. Magelinck, J. Ding, D. Z. Chi, J. Y. Dai, and L. Chan, J. Electrochem. Soc., 149, No. 6, G331–G335 (2002).
S. K. Donthu, D. Z. Chi, S. Tripathy, A. S. Wong, and S. J. Chua, Appl. Phys. A: Mater. Sci. Proc., 79, No. 4, 637–642 (2004).
F. F. Zhao, J. Z. Zheng, Z. X. Shen, T. Osipowicz, W. Z. Gao, and L. H. Chan, Microelectron. Eng., 71, No. 1, 104–111 (2004).
T. Sasaki, S. Nishibe, H. Harima, T. Isshiki, and M. Yoshimoto, Proceedings, Fourteenth IEEE International Conference on Advanced Thermal Processing of Semiconductors, Kyoto (2006), pp. 217–222.
M. Bhaskaran, S. Sriram, T. S. Perova, V. Ermakov, G. J. Thorogood, K. T. Short, and A. S. Holland, Micron, 40, No. 1, 89–93 (2009).
P. S. Lee, D. Mangelinck, K. L. Pey, Z. X. Shen, J. Ding, T. Osipowicz, and A. See, Electrochem. Solid-State Lett., 3, No. 3, 153–155 (2000).
N. Ikarashi, J. Appl. Phys., 107, No. 7, 033505 (2010).
J. C. Tsang, Y. Yokota, R. Matz, and G. Rubloff, Appl. Phys. Lett., 44, No. 4, 430–432 (1984).
H. L. Seng, T. Osipowicz, P. S. Lee, D. Mangelinck, T. C. Sum, and F. Watt, Nucl. Instr. Meth. Phys. Res. B, 181, No. 3, 399–403 (2001).
N. Ikarashi and K. Masuzaki, J. Appl. Phys., 109, No. 10, 063506 (2011).
Author information
Authors and Affiliations
Corresponding author
Additional information
Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 79, No. 6, pp. 1002–1005, November–December, 2012.
Rights and permissions
About this article
Cite this article
Solodukha, V.A., Turtsevich, A.S., Solovyev, Y.A. et al. Identification of nickel silicide phases on a silicon surface from Raman spectra. J Appl Spectrosc 79, 1002–1005 (2013). https://doi.org/10.1007/s10812-013-9704-9
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10812-013-9704-9