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Use of Capillary Gas Chromatography for Determining Hydrocarbons in High-Purity Silane

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Abstract

A procedure was proposed for the 2D gas-chromatographic determination of C1-C4 hydrocarbons in high-purity silane. The impurities were separated in a capillary column with a newly proposed adsorbent, poly(trimethylsilylpropyne). The detection limits for the impurities are (2−6) × 10−7 vol %, which is 2.5–15 times lower than those found in the literature.

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Translated from Zhurnal Analiticheskoi Khimii, Vol. 60, No. 9, 2005, pp. 958–962.

Original Russian Text Copyright © 2005 by Krylov, Berezkin, Chernova, Salganskii, Sozin.

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Krylov, V.A., Berezkin, V.G., Chernova, O.Y. et al. Use of Capillary Gas Chromatography for Determining Hydrocarbons in High-Purity Silane. J Anal Chem 60, 851–854 (2005). https://doi.org/10.1007/s10809-005-0194-7

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  • DOI: https://doi.org/10.1007/s10809-005-0194-7

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