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Micromachined capacitance-sensitive device with immobilized functional ZnO nanoparticles detecting glucose and uric acid

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Abstract

This study reports a micromachined parylene-C-coated integrated electrode (IDE) sensor fabricated on a polyimide film. Glucose and uric acid within the human sweat concentration range were tested using hydrothermally grown ZnO nanoparticles (NPs) immobilized on the IDE regions of sensors and modified with urate oxidase and glucose oxidase enzymes. Four important sensing parameters, including capacitance, impedance, resistance, and phase, were simultaneously investigated during the dynamic test. The sensor fabrication and characterization of ZnO NPs and ZnO NP formed sensing film were described in detail. The experimental results show that the amount of capacitance change and phase change vs. the concentration variation of glucose and uric acid exhibits an excellent linear regression relationship. On the other hand, the amount of impedance change vs. concentration variation of glucose and uric acid exhibits a power regression relationship. Sensitivities of uric acid and glucose detection based on capacitance changes were 0.1131 pF/µM and 0.7875 pF/µM, respectively. Limits of detection of uric acid and glucose were 1.23 µM and 0.311 µM, respectively. Thus, the developed sensor can be applied to wearable devices for the quantitative analysis of sweat composition in the future.

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Funding

This research was funded by National Science and Technology Council in Taiwan under contract no. 109-2221-E-007 -111 -MY2.

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Authors and Affiliations

  1. Department of Power Mechanical Engineering and NEMS Institute, National Tsing Hua University, Hsinchu, 300, Taiwan

    Chih-Ting Yeh & Guo-Hua Feng

  2. Institute of Nanoengineering and Microsystems, National Tsing Hua University, Hsinchu, 300, Taiwan

    Guo-Hua Feng

Authors
  1. Chih-Ting Yeh
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Contributions

G-HF and C-TY conceived and designed the experiments; C-TY performed the experiments; G-HF and C-TY analyzed the data; G-HF wrote the paper. All authors reviewed the manuscript.

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Correspondence to Guo-Hua Feng.

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Yeh, CT., Feng, GH. Micromachined capacitance-sensitive device with immobilized functional ZnO nanoparticles detecting glucose and uric acid. J Appl Electrochem (2024). https://doi.org/10.1007/s10800-024-02086-z

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