Selective etching of CoFeNiCu/Cu multilayers



Selective etching of CoFeNiCu/Cu multilayers was investigated with different solutions: HNO3/alcohol, FeCl3/HCl, K2Cr2O7/H2SO4 and dilutions of FeCl3/HCl, K2Cr2O7/H2SO4. Polarization curves on a rotating disk electrode were used to assess the corrosion potential and current density of Cu, and Co-rich alloys. Preferential etching of the Co-rich alloy was attributed to either a less positive corrosion potential or a higher corrosion current density compared to the Cu layer. A dilution of the aqueous K2Cr2O7/H2SO4 solution was considered most promising for submicron structure development.


CoFeNiCu corrosion electrodeposition multilayers 



This work was supported by the National Science Foundation.


  1. 1.
    Chou S.Y., Krauss P.R., and Renstrom P.J.(1996). Science 272: 85CrossRefGoogle Scholar
  2. 2.
    Chou S.Y., Krauss P.R., and Renstrom P.J.(1996), Journal of Vacuum Science and Technology B 14: 4129CrossRefGoogle Scholar
  3. 3.
    Sotomayor Torres C.M., Zankovych S., Seekamp J., Kam A.P., Clavijo Cedeno C., Hoffmann T., Ahopelto J., Reuther F., Pfeiffer K., Bleidiessel G., Gruetzner G., Maximov M.V., and Heidari B.(2003). Materials Science and Engineering, C: Biomimetic and Supramolecular Systems C23: 23Google Scholar
  4. 4.
    Chou S.Y., Krauss P.R., and Renstrom P.J.(1995). Applied Physics Letters 67: 3114CrossRefGoogle Scholar
  5. 5.
    Chou S.Y., Krauss P.R., Zhang W., Guo L., and Zhuang L. (1997). Journal of Vacuum Science and Technology B 15: 2897CrossRefGoogle Scholar
  6. 6.
    Li M., Wang J., Zhuang L., and Chou S.Y.(2000). Applied Physics Letters 76: 673CrossRefGoogle Scholar
  7. 7.
    Wang J., Schablitsky S., Yu Z., W Wu, and Chou S.Y.(1999). Journal of Vacuum Science and Technology B 17: 2957CrossRefGoogle Scholar
  8. 8.
    Baibich M.N., Broto J.M., Fert A., Nguyen F., Van Dau, F. Petroff, Eitenne P., Creuzet G., Friederich A., and Chazelas J. (1988). Physics Review Letters 61: 2472CrossRefGoogle Scholar
  9. 9.
    Binasch G., Gruenberg P., Saurenbach F., and Zinn W.(1989). Physical Review B: Condense Matter and Materials Physics 39: 4828Google Scholar
  10. 10.
    Jimbo M., Kanda T., Goto S., Tsunashima S., and S.Uchiyama (1992). Journal of Applied Physics 31 part 2 : L1348CrossRefGoogle Scholar
  11. 11.
    Alper M., Attenborough K., Hart R., Lane S.J., Lashmore D.S., Younes C., and Schwarzacher W.(1993). Applied Physics Letters 63: 2144CrossRefGoogle Scholar
  12. 12.
    Ross C.A.(1994). Annual Review of Material Sciences 24:159CrossRefGoogle Scholar
  13. 13.
    Bird K.D., and Schlesinger M.(1995). Journal of the Electrochemical Society 142: L65CrossRefGoogle Scholar
  14. 14.
    Chassaing E., Nallet P., and Trichet M.F.(1996). Journal of the Electrochemical Society 143: L98CrossRefGoogle Scholar
  15. 15.
    Leith S.D., and Schwartz D.T.(1999). Journal of Micromechanics and Microengineering 9: 97CrossRefGoogle Scholar
  16. 16.
    Arai S., Hasegawa T., and Kaneko N.(2003). Journal of the Electrochemical Society 150: C798CrossRefGoogle Scholar
  17. 17.
    Bonhote C., and Landolt D.(1997). Electrochimica Acta 42: 2407CrossRefGoogle Scholar
  18. 18.
    Bradley P.E., and Landolt D.(1999). Electrochimica Acta 45: 1077CrossRefGoogle Scholar
  19. 19.
    Che-Yih Lim, Huang Q., Xie X., Safir A., Harfenist S.A., Cohn R., and Podlaha E.J.(2004). Journal of Applied Electrochemistry 34: 857CrossRefGoogle Scholar
  20. 20.
    Huang Q., Young D.P., Chan J.Y., Jiang J., and Podlaha E.J.(2002). Journal of the Electrochemical Society, 149: C349CrossRefGoogle Scholar
  21. 21.
    Huang Q., Young D.P., and Podlaha E.J.(2003). Journal of Applied Physics 94: 1864CrossRefGoogle Scholar
  22. 22.
    Huang Q., and Podlaha J. (2004). Journal of the Electrochemical Society 151 : C119CrossRefGoogle Scholar
  23. 23. Scholar
  24. 24.
    Osaka T., Takai M., Sogawa Y., Momma T., Ohashi K., Saito M., Yamada K.(2004). Journal of the Electrochemical Society 146: 2092CrossRefGoogle Scholar

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© Springer Science+Business Media, Inc. 2005

Authors and Affiliations

  1. 1.Gordon A. and Mary Cain Department of Chemical EngineeringLouisiana State UniversityBaton RougeUSA

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