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Adsorption Techniques for Fine Purification of Substances for Microelectronics and Optics

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Inorganic Materials Aims and scope

Abstract

This paper reviews systematic studies aimed at developing the physicochemical foundations of adsorption purification of volatile compounds of Group II–VI elements (halides, inorganic hydrides, metalorganic compounds, and process gases) attractive for electronic and optical applications. The efficiency of fine purification via adsorption is analyzed in comparison with distillation, extraction, and crystallization, and the role of the adsorption step in integrated processes for the preparation of high-purity substances is discussed. Future directions in developing adsorption techniques for fine purification of substances are outlined.

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Authors and Affiliations

  1. Moscow State University, Vorob'evy gory 1, Moscow, 119992, Russia

    A. M. Tolmachev & E. N. Egorov

  2. Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of Sciences, Leninskii pr. 31, Moscow, 119991, Russia

    V. A. Fedorov & S. V. Nikolashin

Authors
  1. A. M. Tolmachev
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  2. V. A. Fedorov
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  3. E. N. Egorov
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  4. S. V. Nikolashin
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Original Russian Text Copyright © 2005 by Tolmachev, Fedorov, Egorov, Nikolashin.

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Tolmachev, A.M., Fedorov, V.A., Egorov, E.N. et al. Adsorption Techniques for Fine Purification of Substances for Microelectronics and Optics. Inorg Mater 41 (Suppl 1), S75–S96 (2005). https://doi.org/10.1007/s10789-005-0319-2

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  • DOI: https://doi.org/10.1007/s10789-005-0319-2

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