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Selected-Area Deposition of Fibrous Carbon Nanomaterials from Ethanol Vapor at Substrate Temperatures below 500°C

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Abstract

Selected-area deposition of fibrous carbon nanomaterials at reduced substrate temperatures via pyrolysis of ethanol vapor is studied. The results demonstrate that, in a reactor fitted with an internal high-temperature heater, deposition is possible at substrate temperatures down to 330–350°C, which is about 150°C lower in comparison with conventional, externally heated reactors.

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Authors and Affiliations

  1. Institute of Microelectronics Technology and High-Purity Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, 142432, Russia

    A. N. Red'kin, L. V. Malyarevich & A. A. Vakulenko

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  1. A. N. Red'kin
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  2. L. V. Malyarevich
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  3. A. A. Vakulenko
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__________

Translated from Neorganicheskie Materialy, Vol. 41, No. 11, 2005, pp. 1311–1314.

Original Russian Text Copyright © 2005 by Red'kin, Malyarevich, Vakulenko.

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Red'kin, A.N., Malyarevich, L.V. & Vakulenko, A.A. Selected-Area Deposition of Fibrous Carbon Nanomaterials from Ethanol Vapor at Substrate Temperatures below 500°C. Inorg Mater 41, 1153–1156 (2005). https://doi.org/10.1007/s10789-005-0278-7

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  • DOI: https://doi.org/10.1007/s10789-005-0278-7

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