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Structure and properties of films grown on Si, Ta, Ti, Mo, W, and Ni substrates by reactive ion-beam sputtering

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Abstract

Thin films are grown on Si, Ta, Ti, Mo, W, and Ni substrates by reactive ion-beam sputtering, and their structure, phase composition, and properties are studied. The films are found to consist of the nitride and oxide of the substrate metal, TiN, and randomly distributed TiO2 inclusions. All of the phases are polycrystalline. Si substrates are shown to have an epitaxial effect on the structure of the phases in the film. The films offer greater hardness, better adhesion, and higher corrosion resistance compared to those grown by ion implantation.

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REFERENCES

  1. Ignatenko, P.I., Klyakhina, N.A., and Badekin, M. Yu., Structure and Properties of Metal Nitride Films Produced by Ion Implantation, Neorg. Mater., 2005, vol. 41, no. 1, pp. 40–45 [Inorg. Mater. (Engl. Transl.), vol. 41, no. 1, pp. 36–41].

    Google Scholar 

  2. Andrievskii, R.A., Kalinnikov, G.V., Kobelev, N.P., et al., Structure and Physicomechanical Properties of Nanostructured Boron Nitride Films, Fiz. Tverd. Tela (S.-Peterburg), 1997, vol. 39, no. 10, pp. 1859–1864.

    Google Scholar 

  3. Andrievskii, R.A., Synthesis and Properties of Films of Interstitial Compounds, Usp. Khim., 1997, vol. 66, no. 1, pp. 57–77.

    Google Scholar 

  4. Andrievskii, R.A., Synthesis and Properties of Silicon Nitride, Usp. Khim., 1995, vol. 64, no. 4, pp. 311–329.

    Google Scholar 

  5. Myers, S., Ion-Implanted Metallic Layers, Thin Films: Interdiffusion and Reactions, Poate, J., Tu, K., and Mayer, J., Eds., New York: Wiley, 1978. Translated under the title Tonkie plenki. Vzaimnaya diffuziya i reaktsii, Moscow: Mir, 1982, pp. 539–572.

    Google Scholar 

  6. Vasil’ev, I.P., Zlobin, V.N., and Bondarenko, V.I., Ion Implantation of Catalysts, Tr. Ukr. Vak. O-va., 1997, vol. 3, pp. 70–72.

    Google Scholar 

  7. Andreev, A.A., Gavrilko, I.V., Kunchenko, V.V., et al., Characterization of Ti-N2 and Zr-N2 Films Produced by Vacuum Plasma Deposition (RIBS Process), Fiz. Khim. Obrab. Mater., 1980, no. 3, pp. 64–67.

  8. Dubovitskaya, N.V., Kolenchenko, L.D., and Larikov, L.N., Structure and Phase Composition of Titanium Nitride Coatings on Austenitic Steel, Izv. Akad. Nauk SSSR, Met., 1989, no. 3, pp. 162–164.

  9. Jonsson, B. and Hogmark, S., Hardness Measurements of Thin Films, Thin Solid Films, 1984, vol. 114, pp. 257–269.

    Google Scholar 

  10. Missol, W., Energia powierzchni rozdziału faz w metalach, Katowice: Ślask, 1975. Translated under the title Poverkhnostnaya energiya razdela faz v metallakh, Moscow: Metallurgiya, 1978.

    Google Scholar 

  11. Miedema, A.R. and Den Broeder, F.J.A., On the Interfacial Energy in Solid-Liquid and Solid-Solid Metal Combination, Z. Metallkd., 1979, vol. 70, no. 1, pp. 14–20.

    Google Scholar 

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Authors and Affiliations

  1. Donetsk National University, Universitetskaya ul. 24, 83055, Donetsk, Ukraine

    P. I. Ignatenko, N. A. Klyakhina & M. Yu. Badekin

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  1. P. I. Ignatenko
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  2. N. A. Klyakhina
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  3. M. Yu. Badekin
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Translated from Neorganicheskie Materialy, Vol. 41, No. 2, 2005, pp. 193–196.

Original Russian Text Copyright © 2005 by Ignatenko, Klyakhina, Badekin.

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Ignatenko, P.I., Klyakhina, N.A. & Badekin, M.Y. Structure and properties of films grown on Si, Ta, Ti, Mo, W, and Ni substrates by reactive ion-beam sputtering. Inorg Mater 41, 148–151 (2005). https://doi.org/10.1007/s10789-005-0034-z

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  • DOI: https://doi.org/10.1007/s10789-005-0034-z

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