Abstract
We present an uncooled high-sensitivity bolometric terahertz detector by incorporating plasmonic absorbers and transducer beams made of phase changing materials. We present a comprehensive design parameter analysis of the bolometer device—from electromagnetic absorption to thermal and mechanical analysis. Our design integrates plasmonic absorber and vanadium dioxide (VO2) beams biased at transition temperature to achieve ultra-high temperature coefficient of resistance. The beams are positioned in proximity to plasmonic hot spots created by radiation absorption. Such integration simultaneously allows spectrum selectivity and tunability in radiation absorption across a wide band in the THz regime as well as high-sensitivity detection by a small-footprint device. The design additionally facilitates simultaneous sensing of intensity and polarization of incident radiation by utilizing polarization-dependent plasmonic field enhancement. We estimate a responsivity over 5 kV·W−1, noise equivalent power (NEP) below 12 pW, and normalized detectivity over 108 cm·Hz1/2·W−1 which are competitive to state-of-the-art THz bolometer designs.
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References
M. Beruete, I. Jáuregui-López, Terahertz sensing based on metasurfaces. Adv. Opt. Mater. 8(3), 1900721 (2020). https://doi.org/10.1002/adom.201900721
D.F. Santavicca et al., Energy resolution of terahertz single-photon-sensitive bolometric detectors. Appl. Phys. Lett. 96(8), 083505 (2010). https://doi.org/10.1063/1.3336008
J.W. Song et al., Bolometric terahertz detection in pinched-off quantum point contacts. Appl. Phys. Lett. 97(8), 083109 (2010). https://doi.org/10.1063/1.3475488
M. Coppinger, N.A. Sustersic, J. Kolodzey, T.H. Allik, Sensitivity of a vanadium oxide uncooled microbolometer array for terahertz imaging. Opt. Eng. 50(5), 053206 (2011). https://doi.org/10.1117/1.3574066
N. Oda, Uncooled bolometer-type Terahertz focal plane array and camera for real-time imaging. C. R. Phys. 11(7), 496–509 (2010). https://doi.org/10.1016/j.crhy.2010.05.001
D.-T. Nguyen, F. Simoens, J.-L. Ouvrier-Buffet, J. Meilhan, J.-L. Coutaz, Broadband THz uncooled antenna-coupled microbolometer array—electromagnetic design, simulations and measurements. IEEE Trans. Terahertz Sci. Technol. 2(3), 299–305 (2012). https://doi.org/10.1109/TTHZ.2012.2188395
N. Nemoto et al., High-sensitivity and broadband, real-time terahertz camera incorporating a micro-bolometer array with resonant cavity structure. IEEE Trans. Terahertz Sci. Technol. 6(2), 175–182 (2016). https://doi.org/10.1109/TTHZ.2015.2508010
M.W. Khan, J.M. Sullivan, J. Lee, O. Boyraz, High sensitivity long-wave infrared detector design based on integrated plasmonic absorber and VO2 nanobeam. IEEE J. Quantum Electron. 57(4), 1–11 (2021). https://doi.org/10.1109/JQE.2021.3080287
M.W. Khan et al., Selective and efficient infrared detection by plasmonically heated vanadium-dioxide nanowire, in Plasmonics: Design Materials, Fabrication, Characterization, and Applications XVIII. Sep 11462, 114622S (2020). https://doi.org/10.1117/12.2568971
L.A.L. de Almeida, G.S. Deep, A.M.N. Lima, I.A. Khrebtov, V.G. Malyarov, H. Neff, Modeling and performance of vanadium–oxide transition edge microbolometers. Appl. Phys. Lett. 85(16), 3605–3607 (2004). https://doi.org/10.1063/1.1808890
S. Chen, H. Ma, S. Xiang, X. Yi, Fabrication and performance of microbolometer arrays based on nanostructured vanadium oxide thin films. Smart Mater. Struct. 16(3), 696–700 (2007). https://doi.org/10.1088/0964-1726/16/3/016
Z. Shao, X. Cao, H. Luo, P. Jin, Recent progress in the phase-transition mechanism and modulation of vanadium dioxide materials. NPG Asia Mater. 10(7), 581–605 (2018). https://doi.org/10.1038/s41427-018-0061-2
Y. Xu, W. Huang, Q. Shi, Y. Zhang, L. Song, Y. Zhang, Synthesis and properties of Mo and W ions co-doped porous nano-structured VO2 films by sol–gel process. J. Sol-Gel Sci. Technol. 64(2), 493–499 (2012). https://doi.org/10.1007/s10971-012-2881-9
Y. Wu et al., Decoupling the lattice distortion and charge doping effects on the phase transition behavior of VO2 by titanium (Ti4+) doping. Sci. Rep. (2015). https://doi.org/10.1038/srep09328
K. Shibuya, M. Kawasaki, Y. Tokura, Metal-insulator transition in epitaxial V1−xWxO2(0 ≤ x ≤ 0.33) thin films. Appl. Phys. Lett. 96(2), 022102 (2010). https://doi.org/10.1063/1.3291053
N.C.J. van der Valk, W.A.M. van der Marel, P.C.M. Planken, Terahertz polarization imaging. Opt. Lett. 30(20), 2802–2804 (2005). https://doi.org/10.1364/OL.30.002802
S. Katletz et al., Polarization sensitive terahertz imaging: detection of birefringence and optical axis. Opt. Express 20(21), 23025–23035 (2012). https://doi.org/10.1364/OE.20.023025
F.J. González, J. Alda, J. Simón, J. Ginn, G. Boreman, The effect of metal dispersion on the resonance of antennas at infrared frequencies. Infrared Phys. Technol. 52(1), 48–51 (2009). https://doi.org/10.1016/j.infrared.2008.12.002
P.D. Cunningham et al., Broadband terahertz characterization of the refractive index and absorption of some important polymeric and organic electro-optic materials. J. Appl. Phys. 109(4), 043505 (2011). https://doi.org/10.1063/1.3549120
F. Sanjuan, J. O. Tocho, Optical properties of silicon, sapphire, silica and glass in the Terahertz range, in Latin America Optics and Photonics Conference, Sao Sebastiao, 2012, p. LT4C.1. https://doi.org/10.1364/LAOP.2012.LT4C.1.
F. Ling, Z. Zhong, R. Huang, B. Zhang, A broadband tunable terahertz negative refractive index metamaterial. Sci. Rep. (2018). https://doi.org/10.1038/s41598-018-28221-3
E. Smith, Vanadium oxide microbolometers with patterned gold black or plasmonic resonant absorbers. Electron. Theses Diss. 2015. https://stars.library.ucf.edu/etd/1404
Q. Zhao, M.W. Khan, S. Farzinazar, J. Lee, O. Boyraz, Plasmo-thermomechanical radiation detector with on-chip optical readout. Opt. Express 26(23), 29638–29650 (2018). https://doi.org/10.1364/OE.26.029638
Q. Zhao, M. W. Khan, P. Sadri-Moshkenani, R. Regan, F. Capolino, O. Boyraz, Demonstration of a plasmo-thermomechanical radiation detector with Si3N4 waveguide optical readout circuit, in Conference on Lasers and Electro-Optics (2018), Paper JW2A.175, May 2018, p. JW2A.175. https://doi.org/10.1364/CLEO_AT.2018.JW2A.175.
Q. Zhao, P. Sadri-Moshkenani, M.W. Khan, R. Torun, O. Boyraz, On-chip bimetallic plasmo-thermomechanical detectors for mid-infrared radiation. IEEE Photonics Technol. Lett. 29(17), 1459–1462 (2017). https://doi.org/10.1109/LPT.2017.2728373
T. Kawakubo, K. Komeya, Static and cyclic fatigue behavior of a sintered silicon nitride at room temperature. J. Am. Ceram. Soc. 70(6), 400–405 (1987). https://doi.org/10.1111/j.1151-2916.1987.tb05659.x
W.-H. Chuang, R.K. Fettig, R. Ghodssi, Nano-scale fatigue study of LPCVD silicon nitride thin films using a mechanical-amplifier actuator. J. Micromech. Microeng. 17(5), 938–944 (2007). https://doi.org/10.1088/0960-1317/17/5/013
A. Rogalski, Infrared Detectors (CRC Press, Boca Raton, 2010)
V. Théry et al., Role of thermal strain in the metal-insulator and structural phase transition of epitaxial VO2 films. Phys. Rev. B 93(18), 184106 (2016). https://doi.org/10.1103/PhysRevB.93.184106
C.D. Reintsema, E.N. Grossman, J.A. Koch, Improved VO2 microbolometers for infrared imaging: operation on the semiconducting-metallic phase transition with negative electrothermal feedback. Infrared Technol. Appl. XXV 3698, 190–200 (1999). https://doi.org/10.1117/12.354520
L.A.L. de Almeida, G.S. Deep, A.M. Nogueira-Lima, H. Neff, Modeling of the hysteretic metal-insulator transition in a vanadium dioxide infrared detector. Opt. Eng. 41(10), 2582–2588 (2002). https://doi.org/10.1117/1.1501095
M. Romano et al., Broadband sub-terahertz camera based on photothermal conversion and IR thermography. J. Infrared Millim. Terahertz Waves 37(5), 448–461 (2016). https://doi.org/10.1007/s10762-015-0241-x
N. Oda et al., Microbolometer terahertz focal plane array and camera with improved sensitivity in the sub-terahertz region. J. Infrared Millim. Terahertz Waves 36(10), 947–960 (2015). https://doi.org/10.1007/s10762-015-0184-2
L. Vicarelli, A. Tredicucci, A. Pitanti, Micromechanical bolometers for subterahertz detection at room temperature. ACS Photonics 9(2), 360–367 (2022). https://doi.org/10.1021/acsphotonics.1c01273
D. Dufour et al., Review of terahertz technology development at INO. J. Infrared Millim. Terahertz Waves 36(10), 922–946 (2015). https://doi.org/10.1007/s10762-015-0181-5
D. Jang, M. Kimbrue, Y.-J. Yoo, K.-Y. Kim, Spectral characterization of a microbolometer focal plane array at terahertz frequencies. IEEE Trans. Terahertz Sci. Technol. 9(2), 150–154 (2019). https://doi.org/10.1109/TTHZ.2019.2893573
F. Simoens, J. Meilhan, Terahertz real-time imaging uncooled array based on antenna- and cavity-coupled bolometers. Philos. Trans. R. Soc. Math. Phys. Eng. Sci. 372(2012), 20130111 (2014). https://doi.org/10.1098/rsta.2013.0111
R.C. Jones, Performance of detectors for visible and infrared radiation, in Advances in Electronics and Electron Physics, vol. 5, ed. by L. Marton (Academic Press, Cambridge, 1953), pp. 1–96
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Khan, M.W., Boyraz, O. Polarization-Sensitive Terahertz Bolometer Using Plasmonically-Heated Vanadium-Dioxide Beam. Int J Thermophys 44, 9 (2023). https://doi.org/10.1007/s10765-022-03115-9
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DOI: https://doi.org/10.1007/s10765-022-03115-9