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Photoacoustic Spectroscopy Using a MEMS Microphone with Inter-IC Sound Digital Output

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Abstract

In photoacoustic spectroscopy that is adopted for gas sensing, microphones are usually used to detect the pressure variation inside the sample cell. The application of a new commercial inter-integrated circuit sound digital micro-electro-mechanical systems (MEMS) microphone that is enhanced with a filter and an analog-to-digital converter in a single package is presented. The utilization of the described MEMS microphone together with an embedded microcontroller significantly reduces the required space and costs for the components needed to realize the signal detection path of the spectrometer. The measurement results of this signal detection path are compared with those of a conventional photoacoustic spectrometer that is equipped with a capacitive microphone, a microphone preamplifier, and a lock-in amplifier for signal processing. At the first stage of our study, the recorded 24 bit data streams of both microphones are evaluated. At a second stage, the digital output signals of the MEMS microphone are processed with the Goertzel algorithm. The results are compared with the digital output of a lock-in amplifier that is connected to the microphone preamplifier’s output of the condenser microphone.

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References

  1. A. Rosencwaig, Photoacoustics and Photoacoustic Spectroscopy (Wiley, New York, 1980)

    Google Scholar 

  2. G.M. Sessler, J.E. West, J. Acoust. Soc. Am. 34, 1787 (1962)

    Article  ADS  Google Scholar 

  3. P. Loeppert, B. Sung, SiSonic—The First Commercialized MEMS Microphone. Presented at Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head, SC, 2005)

  4. M. Pedersen, J. McClelland, Proc. SPIE 5732, 108 (2005)

  5. C. Grinde, A. Sanginario, P.A. Ohlckers, G.U. Jensen, M.M. Mielnik, J. Micromech. Microeng. 20, 045010 (2010)

    Article  ADS  Google Scholar 

  6. Omnidirectional Microphone with Bottom Port and Analog Output, Data Sheet, Analog Devices (2010)

  7. Omnidirectional Microphone with Bottom Port and Digital Output, Data Sheet, Analog Devices (2010)

  8. E. Nodov, Appl. Opt. 17, 1110 (1978)

    Article  ADS  Google Scholar 

  9. H. Bruhns, A. Marianovich, S. Rhein, M. Wolff, Digital MEMS Microphone with Inter-IC Sound Interface for Photoacoustic Spectroscopy. Proceedings of 14th international meeting on chemical sensors (2012), pp. 1212–1219

  10. Model 7265 DSP Lock-in Amplifier, Instruction Manual, Ametek (2002)

  11. G. Goertzel, Am. Math. Mon. 65, 34 (1958)

    Article  MATH  MathSciNet  Google Scholar 

  12. K. Banks, The Goertzel Algorithm (2002), http://www.embedded.com/design/configurable-systems/4024443/The-Goertzel-Algorithm. Accessed 12 June 2014

  13. Omnidirectional Microphone with Bottom Port and \(\text{ I }^{2}\text{ S }\) Digital Output, Data Sheet, Analog Devices (2011)

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Authors and Affiliations

  1. Heinrich Blasius Institute for Physical Technologies, Hamburg University of Applied Sciences, Berliner Tor 21, 20099, Hamburg, Germany

    H. Bruhns, A. Marianovich & M. Wolff

Authors
  1. H. Bruhns
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  2. A. Marianovich
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  3. M. Wolff
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Correspondence to H. Bruhns.

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Bruhns, H., Marianovich, A. & Wolff, M. Photoacoustic Spectroscopy Using a MEMS Microphone with Inter-IC Sound Digital Output. Int J Thermophys 35, 2292–2301 (2014). https://doi.org/10.1007/s10765-014-1690-5

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  • DOI: https://doi.org/10.1007/s10765-014-1690-5

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