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MEMS Slow-Wave CPW Phase Shifter for mm-Wave Applications

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Abstract

MEMS-based phase shifters show the best performance in terms of figure of merit, but their footprints are usually large and it is difficult to achieve several bits. This paper demonstrates a miniaturized phase shifter based on slow-wave CPW and MEMS that occupy 0.47 mm2. A total phase shift of 152° was obtained with a maximum insertion loss of 3 dB, resulting in a figure of merit of 50°/dB at 60 GHz. The 3-bit device showed an insertion loss variation of 1.3 dB and return loss better than 13 dB. The pull-in and pull-out voltages were measured to be 17 V and 10 V, respectively. The presented device is well suited for mm-wave phased array applications. Thanks to the proposed concept, more bits could be easily achieved and much higher frequencies could be addressed.

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Acknowledgments

This paper was submitted in July 3rd, 2018. The authors would like to thank the Brazilian agencies FAPESP, CNPq, and CAPES; and the French laboratory LAIR CEA-LETI for the financial support.

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Authors and Affiliations

  1. The Polytechnic School of the University of Sao Paulo, Butantã, SP, 05508-010, Brazil

    Gustavo P. Rehder, Robert G. Bovadilla, Franz S. Bedoya & Ariana L. C. Serrano

  2. The Université Grenoble Alpes, CEA, LETI, 38000, Grenoble, France

    Bruno Reig & Cedric Dehos

  3. TiHive Technologies, 38240, Meylan, France

    Victoria Nasserddine

  4. The RFIC-Laboratory, Université de Grenoble-Alpes, 38016, Grenoble, France

    Philippe Ferrari

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  1. Gustavo P. Rehder
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  2. Robert G. Bovadilla
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  3. Franz S. Bedoya
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  4. Bruno Reig
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  5. Cedric Dehos
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  6. Ariana L. C. Serrano
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  8. Philippe Ferrari
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Correspondence to Gustavo P. Rehder.

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Rehder, G.P., Bovadilla, R.G., Bedoya, F.S. et al. MEMS Slow-Wave CPW Phase Shifter for mm-Wave Applications. J Infrared Milli Terahz Waves 41, 1227–1244 (2020). https://doi.org/10.1007/s10762-020-00731-0

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  • DOI: https://doi.org/10.1007/s10762-020-00731-0

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