Skip to main content
Log in

Terahertz Imaging Detectors in CMOS Technology

  • Published:
Journal of Infrared, Millimeter, and Terahertz Waves Aims and scope Submit manuscript

Abstract

Square-law power detection circuits with on-chip antennas and amplifiers are presented for the detection of 0.65-THz radiation in a low-cost 0.25-μm CMOS technology. The circuit architecture combines metal-insulator-metal (MIM) coupling capacitors with NMOS transistors to facilitate self-mixing in a resistive mixer. A low-frequency (quasi-static) and a high-frequency (non-quasi-static) analysis of the broad-band circuit is presented. Current and voltage readout techniques of non-amplified detectors are compared, and exhibit a measured responsivity of 5.3 mA/W and 150 V/W respectively. A monolithic integrated 3×5 pixel focal-plane array has been used for single-pixel and multi-pixel imaging of concealed objects at 0.65 THz.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

References

  1. P. de Maagt, P. H. Bolivar, and C. Mann, Terahertz Science, Engineering and Systems – from Space to Earth Applications (Encyclopedia of RF and Microwave Engineering, edited by K. Chang, John Wiley & Sons, Inc., 2005), pp. 5175–5194.

  2. A. Theuwissen, CMOS Image Sensors: State-of-the-art and Future Perspectives (33rd European Solid State Circuits Conference, 2007. ESSCIRC, 2007), pp. 21–27.

  3. B. Floyd, S. Reynolds, U. R. Pfeiffer, T. Beukema, J. Grzyb, and C. Haymes, A Silicon 60GHz Receiver and Transmitter Chipset for Broadband Communications (IEEE Int. Solid-State Circuits Conf., 2006), pp. 184–185.

  4. A. Natarajan, A. Komijani, X. Guan, A. Babakhani, Y. Wang, and A. Hajimiri, A 77GHz Phased Array Transmitter with Local LO-path Phase-shifting in Silicon (IEEE Int. Solid-State Circuits Conf., 2006), pp. 182–183.

  5. E. Öjefors and U. Pfeiffer, A 94-GHz Monolithic Front-end for Imaging Arrays in SiGe:C Technology (European Microwave Integrated Circuits Conf. (EuMIC), 2008), pp. 422–425.

  6. M. Varonen, M. Karkkainen, and K. Halonen, V-band Balanced Resistive Mixer in 65-nm CMOS (Proc. 33rd European Solid State Circuits Conference (ESSCIRC), 2007), pp. 360–363.

  7. E. Seok, C. Cao, D. Shim, D. J. Arenas, D. B. Tanner, C.-M. Hung, and K. K. O, A 410 GHz CMOS Push-push Oscillator with an On-chip Patch Antenna (IEEE Intl. Solid-State Circuits Conf., 2008), pp. 472–473.

  8. R. A. Barett, “Broadband RF detector using FET,” US Patent 4, 647–848, (1987).

    Google Scholar 

  9. H.-G. Krekels, B. Schiek, and E. Menzel, Power Detector with GaAs Field Effect Transistors (Proc. European Microwave Conf., 1992), pp. 174–179.

  10. U. Pfeiffer and D. Goren, “A 20dBm fully-integrated 60GHz SiGe power amplifier with automatic level control,” IEEE Journal of Solid-State Circuits 42(7), 1455–1463 (2007).

    Article  Google Scholar 

  11. J. Gorisse, A. Cathelin, A. Kaiser, and E. Kerherve, A 60GHz CMOS RMS Power Detector for Antenna Impedance Mismatch Detection (Circuits and Systems and TAISA Conference, 2008), pp. 93–96.

  12. V. Leung, L. Larson, and P. Gudem, “Digital-if WCDMA handset transmitter IC in 0.25-/spl mu/m SiGe BiCMOS,” IEEE Journal of Solid-State Circuits 39(12), 2215–2225 (2004).

    Article  Google Scholar 

  13. M. Dyakonov and M. Shur, “Plasma wave electronics: novel terahertz devices using two dimensional electron fluid,” IEEE Transactions on Electron Devices 43(10), 1640–1645 (1996).

    Article  Google Scholar 

  14. W. Knap, F. Teppe, Y. Meziani, N. Dyakonova, J. Lusakowski, F. Boeuf, T. Skotnicki, D. Maude, S. Rumyantsev, and M. S. Shur, “Plasma wave detection of sub-terahertz and terahertz radiation by silicon field-effect transistors,” Applied Physics Letters 85(4), 675–677 (2004).

    Article  Google Scholar 

  15. R. Tauk, F. Teppe, S. Boubanga, D. Coquillat, W. Knap, Y. M. Meziani, C. Gallon, F. Boeuf, T. Skotnicki, and C. Fenouillet-Beranger, “Plasma wave detection of terahertz radiation by silicon field effect transistors: Responsivity and noise equivalent power,” Applied Physics Letters 89, 253511 – 253511-3 (2006).

    Google Scholar 

  16. U. R. Pfeiffer and E. Öjefors, A 600-GHz CMOS Focal-plane Array for Terahertz Imaging Applications (European Solid-State Circuits Conf., 2008), pp. 110–114.

  17. U. Pfeiffer, E. Öjefors, F. Voltolina, A. Lisauskas, V. F. Nzogang, P. Bolivar, and H. Roskos, A CMOS Focal-plane Array for Terahertz Imaging (Proc. 33rd Intl. Conf. Infrared, Millimeter, and Terahertz Waves, 2008).

  18. S. A. Maas, “A GaAs MESFET mixer with very low intermodulation,” IEEE Transactions on Microwave Theory and Techniques 35(4), 425–429 (1987).

    Article  Google Scholar 

  19. E. Öjefors, U. R. Pfeiffer, A. Lisauskas, and H. G. Roskos, “A 0.65 THz focal-plane array in a quarter-micron CMOS process technology,” IEEE Journal of Solid-State Circuits 44(7), 1968–1976 (2009).

    Article  Google Scholar 

  20. A. J. Scholten, L. F. Tiemeijer, P. W. H. de Vreede, and D. B. M. Klaassen, “A large signal non-quasi-static MOS model for RF circuit simulation,” (Int. Electron Devices Meeting (IEDM), 1999), pp. 163 – 166 .

  21. B. Wang, J. R. Hellums, and C. G. Sodini, “MOSFET thermal noise modeling for analog integrated circuits,” IEEE Journal of Solid-State Circuits 29(7), 833–835 (1994).

    Article  Google Scholar 

  22. B. Heinemann, R. Barth, D. Knoll, H. Rücker, B. Tillack, and W. Winkler, “High performance BiCMOS technologies without epitaxially-buried subcollectors and deep trenches,” Semiconductor Science and Technology 22, 153–157 (2007).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Ullrich R. Pfeiffer.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Öjefors, E., Lisauskas, A., Glaab, D. et al. Terahertz Imaging Detectors in CMOS Technology. J Infrared Milli Terahz Waves 30, 1269–1280 (2009). https://doi.org/10.1007/s10762-009-9569-4

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10762-009-9569-4

Keywords

Navigation