Skip to main content
SpringerLink
Log in

Synthesis of Aluminum Oxide Nanostructures on the Silicon Surface

  • Plasma Chemistry
  • Published:
High Energy Chemistry Aims and scope Submit manuscript

Abstract

Data on the synthesis of aluminum oxide nanostructures on the silicon surface by the oxidation of atomic aluminum layers with a high-frequency inductively coupled oxygen discharge plasma are reported. The conditions for the formation and the properties of aluminum oxide nanolayers were determined. It was found that this method affords oxide films with uniform structure and composition.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

REFERENCES

  1. Martinu, L. and Poitras, D., J. Vac. Sci. Technol., A, 2000, vol. 18, no.6, p. 2619.

    Google Scholar 

  2. Goto, T., Zhang, W., and Hirai, T., Jpn. J. Appl. Phys., 1999, vol. 38, part 1, no. 38, p. 3668.

    Article  Google Scholar 

  3. Johnson, R.S., Lucovsky, G., and Baumvol, I., J. Vac. Sci. Technol., A, 2001, vol. 19, no.4, p. 1353.

    Google Scholar 

  4. Sproul, W.D., Graham, M.E., Wong, M.S., Lopez, S., Li, D., and Scholl, R.A., J. Vac. Sci. Technol., A, 1995, vol. 13, no.3, p. 1188.

    Google Scholar 

  5. Saksonskii, V.A., Shchurov, A.N., Potapov, V.K., Druzhinin, A.A., and Gerchikov, M.V., Prib. Tekh. Eksp., 1984, no. 2, p. 222.

Download references

Author information

Authors and Affiliations

  1. State Scientific Center, Karpov Institute of Physical Chemistry, ul. Vorontsovo pole 10, Moscow, 103064, Russia

    V. K. Potapov, V. M. Matyuk & L. I. Trakhtenberg

Authors
  1. V. K. Potapov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. V. M. Matyuk
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. L. I. Trakhtenberg
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

__________

Translated from Khimiya Vysokikh Energii, Vol. 39, No. 5, 2005, pp. 379–381.

Original Russian Text Copyright © 2005 by Potapov, Matyuk, Trakhtenberg.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Potapov, V.K., Matyuk, V.M. & Trakhtenberg, L.I. Synthesis of Aluminum Oxide Nanostructures on the Silicon Surface. High Energy Chem 39, 330–332 (2005). https://doi.org/10.1007/s10733-005-0065-7

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10733-005-0065-7

Keywords

Search

Navigation