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Method of Eliminating Flatness Defects of Heat Bonded Glass Plates

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A method of eliminating gaps between heat bonded glass plates has been developed using a system for distributing mechanical load. The proposed method was investigated theoretically and experimentally. The results of numerical and full-scale model experiments confirming the efficacy of the proposed method are presented.

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References

  1. A. N. Agafonov, V. I. Platonov, A. M. Batalova, et al., “Development of the manufacturing technology of microfluidic systems on glass plates,” in: AIP Conference Proceedings. International Conference on Advanced Materials, ICAM 2019, New Delhi, 6 – 7 March 2019, American Institute of Physics Inc., New Delhi (2020), Vol. 2276, pp. 1 – 10.

  2. I. A. Platonov, V. I. Platonov, I. N. Kolesnichenko, et al. “Microfluidic systems in gas analysis: a review,” Sorbts. Khromatogr. Protsessy, 15(6), 754 – 768 (2015).

    Google Scholar 

  3. K. I. Potienko and A. N. Agafonov, “Development of technology for manufacturing a microfluidic system based on silicon and glass substrates,” in: International Youth Scientific Conference, “15th Royal Readings,” Dedicated to the 100th Anniversary of the Birth of D. I. Kozlov: Collection of Works, Samara, October 8 – 10, 2019 [in Russian], Samara (2019), Vol. 1, pp. 415 – 416.

  4. K. I. Milanina, A. N. Agafonov, and A. A. Lyapina, “A method of sealing microfluidic systems on glass substrates,” in: All-Russia Scientific and Technical Conference “Actual Problems of Radio Electronics and Telecommunications,” Samara, April 21 – 23, 2021 [in Russian], Samara (2021), pp. 114 – 116.

  5. B. Renberg, K. Sato, T. Tsukahara, et al., “Hands on: thermal bonding of nano- and microfluidic chips,” Microchim. Acta, 166, 177 – 181 (2009); URL: https://doi.org/10.1007/s00604-009-0166-y

  6. K. M. Knowles and A. T. J. van Helvoort, “Anodic bonding,” Int. Mater. Rev., 51(5), 273 – 311 (2006); https://doi.org/10.1179/174328006X102501

    Article  CAS  Google Scholar 

  7. Zhi-Jian Jia, Qun Fang, and Zhao-Lun Fang, “Bonding of Glass Microfluidic Chips at Room Temperatures,” Anal. Chem., 76(18), 5597 – 5602 (2004); URL: https://doi.org/10.1021/ac0494477

  8. Yu-Jen Pan and Ruey-Jen Yang, “A glass microfluidic chip adhesive bonding method at room temperature,” J. Micromechan. Microeng., 16(12), 2666 – 2672 (2006).

    Article  CAS  Google Scholar 

  9. R. O. Claus, “Surface and near-surface defects in glass-to-glass bonds: Author affiliations,” Proc. SPIE, Optomechanical Systems Design, 0250 (1980); URL: https://doi.org/10.1117/12.959434

  10. GOST 2789–73. International State Standard. Surface Roughness. Parameters and Characteristics (with Changes 1, 2) [in Russian], Standartinform, Moscow (2018).

  11. J. Kentsch and S. Breisch, “Low temperature adhesion bonding for BioMEMS,” J. Micromechan. Microeng., 16(4), 802 – 807 (2006); https://doi.org/10.1088/0960-1317/16/4/017

    Article  CAS  Google Scholar 

  12. GOST 24642–81. International Standard. Basic Norms of Interchangeability. Tolerances of the Shape and Location of Surfaces [in Russian], Izd. standartov, Moscow (2002).

  13. GOST 9284–75. International State Standard. Glasses for Micropreparations. Specifications [in Russian], Izd. standartov, Moscow (1999).

  14. Z. Chen, L. Zhang, and G. Chen, “A spring-driven press device for hot embossing and thermal bonding of PMMA microfluidic chips,” Electrophoresis, 31, 2512 – 2519 (2010); URL: https://doi.org/10.1002/elps.201000084

  15. A. N. Agafonov, K. I. Milanina, T. A. Andreev, and V. I. Platonov, Pat. on Invention. 2766979 C1. A Method of Thermal Connection of Glass Plates with Microstructures on One of Their Surfaces [in Russian], application 2020139856 dated 12/02/2020; publ. March 16, 2022.

  16. A. A. I’yushin, Proceedings, Vol. 3. Theory of Thermoviscoelasticity [in Russian], Fizmatlit, Moscow (2007).

  17. I. I. Kitaigorodskii, Handbook of Glass Manufacture [in Russian], Gosstroiizdat, Moscow (1963), 1026 p.

    Google Scholar 

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Authors and Affiliations

  1. Academician S. P. Korolev Samara National Research University, Samara, Russia

    K. I. Milanina, A. N. Agafonov & T. A. Andreeva

  2. Scientific Research Institute [SRI] Ekran JSC, Samara, Russia

    T. A. Andreeva

Authors
  1. K. I. Milanina
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  2. A. N. Agafonov
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  3. T. A. Andreeva
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Corresponding author

Correspondence to K. I. Milanina.

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Translated from Steklo i Keramika, No. 9, pp. 13 – 20, September, 2022.

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Milanina, K.I., Agafonov, A.N. & Andreeva, T.A. Method of Eliminating Flatness Defects of Heat Bonded Glass Plates. Glass Ceram 79, 358–362 (2023). https://doi.org/10.1007/s10717-023-00513-9

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  • DOI: https://doi.org/10.1007/s10717-023-00513-9

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