V. S. Kondratenko and O. N. Tret’yakova, Problems of the Development of New Laser Technologies [in Russian], Izd. MAI, Moscow (2018).
V. S. Kondratenko, V. V. Kadomkin, Lu Hung-Tu, et al., “Technology of laser immersion processing of materials,” Pribory, No. 4, 1 – 8 (2020).
P. Boerner, M. Hajri, T. Wahl, et al., “Picosecond pulsed laser ablation of dielectric rods: Angle-dependent ablation process model for laser micromachining,” J. Appl. Phys., 125, 234902 (2019).
Article
Google Scholar
E. N. Glezer and E. Mazur, “Optically produced cross patterning, based on local dislocations inside MgO single crystals,” Appl. Phys. Lett., 71, 882 (1997).
CAS
Article
Google Scholar
M. Lenzner, J. Krüger, S. Sartania, et al., “Femtosecond optical breakdown in dielectrics,” Phys. Rev. Lett., 80, 4076 (1998).
CAS
Article
Google Scholar
Yunxiang Pan, Xueming Lv, Hongchao Zhang, et al., “Millisecond laser machining of transparent materials assisted by a nanosecond laser with different delays,” Opt. Lett., 41(12), 2807 – 2810 (2016).
CAS
Article
Google Scholar
H. Varel, D. Ashkenasi, A. Rosenfeld, et al., “Micromachining of quartz with ultrashort pulses,” Appl. Phys. A, 65(4), 367 – 373 (1997).
CAS
Article
Google Scholar
T. Q. Jia, Z. Z. Xu, R. X. Li, and H. Z. Wang, “Mechanisms in fsec-laser ablation in fused silica,” J. Appl. Phys., 95, 5166 (2004).
CAS
Article
Google Scholar
S. Nolte, C. Momma, H. Jacobs, et al., “Ablation of metals by ultrashort laser pulses,” J. Optical Soc. Am. B, 14(10), 2716 – 2722 (1997).
CAS
Article
Google Scholar
P. P. Pronko, S. K. Dutta, J. Squier, et al., “Machining of sub-micron holes using a femtosecond laser at 800 nm,” Optics Comm. 114, 106 (1995).
CAS
Article
Google Scholar
S. Maruo and S. Kawata, “Three-dimensional microfabrication by use of single-photon-absorbed polymerization,” J. Microelectromech. Syst., 7, 411 (1998).
CAS
Article
Google Scholar
S. Juodkazis, V. Mizeikis, and H. Misawa, “Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications,” J. Appl. Phys., 106(5), 1101 – 1115 (2009).
Article
Google Scholar
D. von der Linde and K. Sokolowski-Tinten, “The physical mechanisms of short-pulse laser ablation,” Appl. Surf. Sci., 154 – 155, 1 – 10 (2000).
Article
Google Scholar
N. I. Smith, K. Fujita, O. Nakamura, and S. Kawata, “Generation of calcium waves in living cells by pulsed-laser-induced photodisruption,” Appl. Phys. Lett., 78(8), 1209 – 1210 (2001).
Google Scholar
V. Mizeikis, S. Juodkazis, A. Marcinkevièius, et al., “Tailoring and characterization of photonic crystals,” Photochem. Rev., 2(1), 35 – 69 (2001).
CAS
Article
Google Scholar
H.-B. Sun, Y. Xu, S. Juodkazis, et al., “Arbitrary-lattice photonic crystals created by multiphoton microfabrication,” Opt. Lett., 26(6), 325 – 332 (2001).
CAS
Article
Google Scholar
X.-Z. Dong, Z. Zhao, X.-M. Duan, and T. Kondo, “Micronanofabrication of assembled three-dimensional microstructures by designable multiple beams multiphoton processing,” Appl. Phys. Lett., 91(12), 4103 (2007).
Article
Google Scholar
T. Kaino, “Waveguide fabrication using organic nonlinear optical materials,” J. Opt. A: Pure Appl. Opt. 2(4), R1 – R7 (2000).
CAS
Article
Google Scholar
M. Miwa, S. Juodkazis, T. Kawakami, et al., “Femtosecond two-photon stereo-lithography,” Appl. Phys. A, 73(5), 561 – 565 (2001).
CAS
Article
Google Scholar
E. N. Glezer, M. Milosavijevic, L. Huang, et al., “Three-dimensional optical storage inside transparent materials,” Opt. Lett., 21(24), 2023 – 2028 (1996).
CAS
Article
Google Scholar
M. Watanabe, H.-B. Sun, S. Juodkazis, et al., “Three-dimensional optical data storage in vitreous silica,” Jpn. J. Appl. Phys., 37, L1527 – L1530 (1998).
Article
Google Scholar
O. N. Tretyakova and G. Yu. Shevchenko, “Development of control programs for automation of laser-controlled thermal splitting of semiconductor and dielectric materials,” Vest. MAI, 18(6), 53 – 67 (2011).
Google Scholar
A. E. Novinskii and G. Yu. Shevchenko, Program for Controlling Laser Processing Equipment for Cutting and Welding: Certificate of State Registration of the Computer Program No. 2013613967. Application No. 2012661679 [in Russian]; received on December 25, 2012; registered in the register of computer programs on April 22, 2013.