Skip to main content
SpringerLink
Log in

Method of Processing Quartz Accessories in the Manufacturing of the Structures of Micro- and Nanoelectronics

  • AT ENTERPRISES AND INSTITUTES
  • Published:
Glass and Ceramics Aims and scope Submit manuscript

The effect of different methods of processing quartz accessories for the purpose of completely removing hardly soluble films of borosilicate and phosphosilicate glasses is investigated. It is shown that the methods developed for processing quartz accessories make it possible to increase cleaning efficiency substantially. The optimal processing regimes for quartz accessories are presented.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. T. A. Ismailov, T. É. Sarkarov, B. A. Shangereeva, and A. R. Shakhmaeva, “Surface protection of low-melting glass based silicon substrates for silicon transistor fabrication,” Steklo Keram., No. 5, 25 – 28 (2017); T. A. Ismailov, T. É. Sarkarov, B. A. Shangereeva, and A. R. Shakhmaeva, “Surface protection of low-melting glass based silicon substrates for silicon transistor fabrication,” Glass Ceram., 74(5 – 6), 169 – 171 (2017).

  2. V. S. Sorokin, B. L. Antipov, and N. P. Lazareva, Materials and Components of Electronics [in Russian], Akademiya, Moscow (2006).

    Google Scholar 

  3. V. A. Golenishchev-Kutuzov, Microelectronics Materials [in Russian], KGÉI, Kazan (2000).

  4. V. V. Pasynkov and V. S. Sorokin, Electronics Materials [in Russian], Lan’, St. Petersburg (2002).

  5. B. L. Antipov, V. S. Sorokin, V. A. Terekhov, Electronics Materials: Problems and Questions [in Russian], Lan’, St. Petersburg (2003).

    Google Scholar 

  6. I. A. Sluchinskaya, Fundamentals of Materials Science and Semiconductor Technology [in Russian], Moscow (2002).

  7. J. M. Martinez-Duart, R. J. Martin-Palma, and F. Agoullo-Rueda, Nanotechnologies for Micro- and Optoelectronics [in Russian], Tekhnosfera, Moscow (2007). (World of materials and technologies).

    Google Scholar 

  8. V. A. Gurtov, Solid-State Electronics [in Russian], Tekhnosfera, Moscow (2005).

    Google Scholar 

  9. B. Yannini, Amazing Electronic Devices [in Russian], NT Press, Moscow (2009).

    Google Scholar 

  10. D. V. Igumnov and G. P. Kostyunina, Fundamentals of Semiconductor Electronics [in Russian], Goryachaya Liniya – Telecom, Moscow (2005).

    Google Scholar 

  11. S. A. Gavrilov and A. N. Belov, Electrochemical Processes in the Technology of Micro- and Nanoelectronics [in Russian], Vyssh. Obrazovanie, Moscow (2009). (Fundamentals of Sciences. Engineering-technical).

    Google Scholar 

  12. A. N. Ignatov, N. E. Fadeeva, and V. L. Savinykh, Classical Electronics and Nanoelectronics [in Russian], Flinta – Nauka, Moscow (2009).

    Google Scholar 

  13. Yu. D. Sibikin and M. Yu. Sibikin, Unconventional Renewable Energy Sources [in Russian], RadioSoft, Moscow (2008).

    Google Scholar 

  14. S. N. Udalov, Renewable Sources of Energy [in Russian], NGTU, Novosibirsk (2009).

    Google Scholar 

  15. V. A. Malyshev, Fundamentals of Quantum Electronics and Laser Technology [in Russian], Vyssh. Shkola, Moscow (2006).

  16. B. N. Poizner, Physical Principles of Laser Technology [in Russian], Izd. NTL, Tomsk (2006).

  17. V. Nemudrov and G. Martin, Systems-on-a-Crystal: Design and Development [in Russian], Tekhnosfera, Moscow (2004).

    Google Scholar 

  18. A. I. Kurnosov, Materials for Semiconductor Devices and Integrated Circuits [in Russian], Vyssh. Shkola, Moscow (1980).

  19. T. A. Ismailov, B. A. Shangereeva, and A. R. Shakhmaeva, “A method of processing quartz accessories, Pat. 2008102629/28 RF, IPC H01L 21/306, No. 2366032,” Byull. Izobr. Polezn. Modeli, No. 24 (2009), declared Jan. 22, 2008; publ. Aug. 20, 2009.

  20. T. A. Ismailov, B. A. Shangereeva, and A. R. Shakhmaeva, “A method of processing of fluoroplastic products, Pat. 2008129468/28 RF, IPC H01L 21/306, No. 2368981,” Byull. Izobr. Polezn. Modeli, No. 27 (2009), declared July 17, 2008; publ. Sept. 27, 2009.

  21. T. A. Ismailov, B. A. Shangreeyeva, and A. R. Shakhmaeva, “A method of primary annealing for processing silicon carbide tubes, Pat. 2008129515/28 RF, IPC H01L 21/22, No. 2376675,” Byull. Izobr. Polezn. Modeli, No. 35 (2009), declared July 17, 2008; publ. December 20, 2009.

  22. T. A. Ismailov, B. A. Shangreeyeva, and A. R. Shakhmaeva, “A method of primary annealing for processing silicon carbide ubes, Pat. 2008129541/28 RF, IPC H01L 21/306, No. 2383965,” Byull. Izobr. Polezn. Modeli, No. 7 (2010), declared July 17, 2008; publ. March 10, 2010.

  23. A. A. Maslov, Technology and Design of Semiconductor Devices [in Russian], Énergiya, Moscow (1970), pp. 53 – 54.

Download references

Author information

Authors and Affiliations

  1. Dagestan State Technical University, Makhachkala, Dagestan, Russia

    T. A. Ismailov, T. É. Sarkarov, A. R. Shakhmaeva & B. A. Shangereeva

Authors
  1. T. A. Ismailov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. T. É. Sarkarov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. R. Shakhmaeva
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. B. A. Shangereeva
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to B. A. Shangereeva.

Additional information

Translated from Steklo i Keramika, No. 12, pp. 37 – 39, December, 2018.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Ismailov, T.A., Sarkarov, T.É., Shakhmaeva, A.R. et al. Method of Processing Quartz Accessories in the Manufacturing of the Structures of Micro- and Nanoelectronics. Glass Ceram 75, 488–490 (2019). https://doi.org/10.1007/s10717-019-00118-1

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10717-019-00118-1

Key words

Search

Navigation