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Modelling of radio frequency sheaths for plasma processing

  • Invited Papers and Discussion Summaries
  • Modelling Industrial Plasmas
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Czechoslovak Journal of Physics Aims and scope

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Authors and Affiliations

  1. Plasma Research Laboratory, School of Physical Sciences, Dublin City University, Dublin, Ireland

    M. M. Turner

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  1. M. M. Turner
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Turner, M.M. Modelling of radio frequency sheaths for plasma processing. Czech J Phys 48 (Suppl 2), 59–69 (1998). https://doi.org/10.1007/s10582-998-0022-z

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