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A hybrid PDMS-Parylene subdural multi-electrode array


In this paper, we report on a cost effective and simple method for fabricating a flexible multi-electrode array for subdural neural recording. The electrode was fabricated using a PDMS-Parylene bilayer to combine the major advantages of both materials. Mechanical and electrical characterizations were performed to confirm functionality of a 16-site electrode array under various flexed/bent conditions. The electrode array was helically wound around a 3 mm diameter cylindrical tube and laid over a 2 cm diameter sphere while maintaining its recording capability. Experimental results showed impedance values between 300 kΩ and 600 kΩ at 1 kHz for 90 μm diameter gold recording sites. Acoustically evoked neural activity was successfully recorded from rat auditory cortex, confirming in vivo functionality.

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The authors would like to thank the staff of the Birck Nanotechnology Center at Purdue University for their help and assistance. We would also like to thank Professor Çagri Savran and Dr. Chun-Li Chang for their assistance with laser micromachining. Partial funding for this work was provided by NIH grant NIBIB-R21-EB 005351-02.

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Correspondence to Manuel Ochoa.

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Nyquist plot of channel impedances for in vivo experiments. (JPEG 119 kb)

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Ochoa, M., Wei, P., Wolley, A.J. et al. A hybrid PDMS-Parylene subdural multi-electrode array. Biomed Microdevices 15, 437–443 (2013).

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  • PDMS
  • Parylene
  • Epilepsy
  • Brain Computer Interface (BCI)
  • Subdural electrode
  • ECoG
  • Flexible electrode