Biomedical Microdevices

, Volume 13, Issue 3, pp 441–451 | Cite as

Novel multi-sided, microelectrode arrays for implantable neural applications

  • John P. Seymour
  • Nick B. Langhals
  • David J. Anderson
  • Daryl R. Kipke
Article

Abstract

A new parylene-based microfabrication process is presented for neural recording and drug delivery applications. We introduce a large design space for electrode placement and structural flexibility with a six mask process. By using chemical mechanical polishing, electrode sites may be created top-side, back-side, or on the edge of the device having three exposed sides. Added surface area was achieved on the exposed edge through electroplating. Poly(3,4-ethylenedioxythiophene) (PEDOT) modified edge electrodes having an 85-μm2 footprint resulted in an impedance of 200 kΩ at 1 kHz. Edge electrodes were able to successfully record single unit activity in acute animal studies. A finite element model of planar and edge electrodes relative to neuron position reveals that edge electrodes should be beneficial for increasing the volume of tissue being sampled in recording applications.

Keywords

Neural recording Microelectrode array Parylene Neural prostheses Drug delivery Chemical mechanical polishing 

Supplementary material

10544_2011_9512_MOESM1_ESM.jpg (423 kb)
Supplemental Fig. 1Electric potential slices and geometries from a three-dimensional COMSOL 4.0a model for each combination of neuron position and electrode type. Electric potential (V) shown in xy-plane cutting through the electrode. (a) Planar electrode. (b) Thin edge electrode, 0.5 μm thick. (c) Thick edge electrode, 5.0 μm thick. (JPEG 423 kb)

References

  1. M.R. Abidian, D.C. Martin, Experimental and theoretical characterization of implantable neural microelectrodes modified with conducting polymer nanotubes. Biomaterials 29(9), 1273–1283 (2008)CrossRefGoogle Scholar
  2. D.J. Anderson, K.G. Oweiss, et al. (2001). Sensor arrays in the micro-environment of the brain. Acoustics, Speech, and Signal Processing, 2001. Proceedings. (ICASSP '01). 2001 IEEE International Conference on Salt Lake City, UT, USAGoogle Scholar
  3. G. Buzsaki, Large-scale recording of neuronal ensembles. Nat. Neurosci. 7(5), 446–451 (2004)CrossRefGoogle Scholar
  4. H.-Y. Chen, A.A. McClelland et al., Solventless adhesive bonding using reactive polymer coatings. Anal. Chem. 80(11), 4119–4124 (2008)CrossRefGoogle Scholar
  5. K.C. Cheung, Implantable microscale neural interfaces. Biomed. Microdevices 9(6), 923–938 (2007)CrossRefGoogle Scholar
  6. C.-C. Chiang, M.-C. Chen et al., Physical and barrier properties of plasma-enhanced chemical vapor deposited -SiC:H films from trimethylsilane and tetramethylsilane. Jpn J. Appl. Phys. 1 Regular Pap. Short Notes Rev. Pap. 42(Compendex), 4273–4277 (2003)Google Scholar
  7. S.F. Cogan, Neural stimulation and recording electrodes. Annu. Rev. Biomed. Eng. 10, 275–309 (2008)CrossRefGoogle Scholar
  8. S.F. Cogan, D.J. Edell et al., Plasma-enhanced chemical vapor deposited silicon carbide as an implantable dielectric coating. J. Biomed. Mater. Res. A 67(Compendex), 856–867 (2003)CrossRefGoogle Scholar
  9. X. Cui, D.C. Martin, Electrochemical deposition and characterization of poly(3, 4-ethylenedioxythiophene) on neural microelectrode arrays. Sens. Actuators, B B89(1–2), 92–102 (2003)CrossRefGoogle Scholar
  10. J.P. Donoghue, A. Nurmikko et al., Assistive technology and robotic control using motor cortex ensemble-based neural interface systems in humans with tetraplegia. J. Physiol. 579(Pt 3), 603–611 (2007)CrossRefGoogle Scholar
  11. W.F. Gorham, A New General Synthetic Method for Preparation of Linear Poly-P-Xylylenes. J. Polym. Sci. Part 1 Polym. Chem. 4(12PA), 3027-& (1966)Google Scholar
  12. H. Haug, Brain sizes, surfaces, and neuronal sizes of the cortex cerebri: a stereological investigation of man and his variability and a comparison with some mammals (primates, whales, marsupials, insectivores, and one elephant). Am. J. Anat. 180(2), 126–142 (1987)CrossRefGoogle Scholar
  13. K. Hyoung-Gyun, A. Yoo-Min et al., Effect of chemicals and slurry particles on chemical mechanical polishing of polyimide. Jpn. J. Appl. Phys., Part 1 (Regular Papers, Short Notes & Review Papers) 39(Copyright 2000, IEE), 1085–1090 (2000)Google Scholar
  14. X. Jun, Y. Xing et al., Surface micromachined leakage proof Parylene check valve (IEEE, Piscataway, 2001)Google Scholar
  15. S. Kim, R. Bhandari et al., Integrated wireless neural interface based on the Utah electrode array. Biomed Microdevices (2008)Google Scholar
  16. D.R. Kipke, W. Shain et al., Advanced neurotechnologies for chronic neural interfaces: new horizons and clinical opportunities. J. Neurosci. 28(46), 11830–11838 (2008)CrossRefGoogle Scholar
  17. D. Klee, N. Weiss et al., Vapor-Based Polymerization of Functionalized [2.2]Paracyclophanes: A Unique Approach Towards Surface-Engineered Microenvironments. Modern Cyclophane Chemistry. (Weinheim, Wiley-VCH, 2004): p.463Google Scholar
  18. J. Lahann, D. Klee et al., Chemical vapour deposition polymerization of substituted [2.2]paracyclophanes. Macromol. Rapid Commun. 19(9), 441–445 (1998)CrossRefGoogle Scholar
  19. E.R. Lewis, Using electronic circuits to model simple neuroelectric interactions. Proc. IEEE 56(6), 931–949 (1968)CrossRefGoogle Scholar
  20. J.S. Lewis, M.S. Weaver, Thin-film permeation-barrier technology for flexible organic light-emitting devices. IEEE J. Sel. Top. Quantum Electron. 10(Copyright 2004, IEE), 45-57 (2004)Google Scholar
  21. W. Li, D. Rodger et al., Integrated Flexible Ocular Coil for Power and Data Transfer in Retinal Prostheses. Conf Proc IEEE Eng Med Biol Soc 1(1), 1028–1031 (2005)Google Scholar
  22. G.E. Loeb, M.J. Bak et al., Parylene as a Chronically Stable, Reproducible Microelectrode Insulator. IEEE Trans. Biomed. Eng. 24(2), 121–128 (1977)CrossRefGoogle Scholar
  23. N.K. Logothetis, C. Kayser et al., In vivo measurement of cortical impedance spectrum in monkeys: implications for signal propagation. Neuron 55(5), 809–823 (2007)CrossRefGoogle Scholar
  24. K.A. Ludwig, R. Miriani et al. Employing a Common Average Reference to Improve Cortical Neuron Recordings from Microelectrode Arrays. J. Neurophysiol. (2008)Google Scholar
  25. K.A. Ludwig, J.D. Uram et al., Chronic neural recordings using silicon microelectrode arrays electrochemically deposited with a poly(3, 4-ethylenedioxythiophene) (PEDOT) film. J. Neural Eng. 3(1), 59–70 (2006)CrossRefGoogle Scholar
  26. J.U. Meyer, T. Stieglitz et al., High density interconnects and flexible hybrid assemblies for active biomedical implants. IEEE Trans. Adv. Packag. 24(3), 366–374 (2001)CrossRefGoogle Scholar
  27. M.A. Moffitt, C.C. McIntyre, Model-based analysis of cortical recording with silicon microelectrodes. Clin. Neurophysiol. 116(9), 2240–2250 (2005)CrossRefGoogle Scholar
  28. H. Nandivada, H.Y. Chen et al., Vapor-based synthesis of poly [(4-formyl-p-xylylene)-co-(p-xylylene)] and its use for biomimetic surface modifications. Macromol. Rapid Commun. 26(22), 1794–1799 (2005)CrossRefGoogle Scholar
  29. D.P. Papageorgiou, S.E. Shore et al., A shuttered neural probe with on-chip flowmeters for chronic in vivo drug delivery. J. Microelectromechanical Syst. 15(4), 1025–1033 (2006)CrossRefGoogle Scholar
  30. E. Pierstorff, R. Lam et al., Nanoscale architectural tuning of parylene patch devices to control therapeutic release rates. Nanotechnology 19(44), 445104 (2008)CrossRefGoogle Scholar
  31. N. Pornsin-Sirirak, M. Liger et al., Flexible parylene-valved skin for adaptive flow control (IEEE, Piscataway, 2002)Google Scholar
  32. E. Purcell, J. Seymour et al. In vivo evaluation of a neural stem cell-seeded probe. Journal of Neural Engineering (In Press) (2009)Google Scholar
  33. R. Rafaela Fernanda Carvalhal, F. Sanches, T.K. Lauro, Polycrystalline Gold Electrodes: A Comparative Study of Pretreatment Procedures Used for Cleaning and Thiol Self-Assembly Monolayer Formation. Electroanalysis 17(14), 1251–1259 (2005)CrossRefGoogle Scholar
  34. R. Redd, M.A. Spak et al. Lithographic process for high-resolution metal lift-off, SPIE (1999)Google Scholar
  35. J. Riera, T. Ogawa et al., Concurrent observations of astrocytic Ca(2+) activity and multisite extracellular potentials from an intact cerebral cortex. J Biophotonics (2009)Google Scholar
  36. E.M. Robinson, R. Lam et al., Localized therapeutic release via an amine-functionalized poly-p-xylene microfilm device. J. Phys. Chem. B 112(37), 11451–11455 (2008)CrossRefGoogle Scholar
  37. D.C. Rodger, Y.C. Tai, Microelectronic packaging for retinal prostheses. IEEE Eng. Med. Biol. Mag. 24(5), 52–57 (2005)CrossRefGoogle Scholar
  38. J.P. Seymour, Y.M. Elkasabi et al., The insulation performance of reactive parylene films in implantable electronic devices. Biomaterials 30(31), 6158–6167 (2009)CrossRefGoogle Scholar
  39. J.P. Seymour, D.R. Kipke, Neural probe design for reduced tissue encapsulation in CNS. Biomaterials 28(25), 3594–3607 (2007)CrossRefGoogle Scholar
  40. A.K. Sharma, H. Yasuda, Effect of glow discharge treatment of substrates on parylene-substrate adhesion. J. Vacuum Sci. Technol. 21(4), 994–998 (1982)CrossRefGoogle Scholar
  41. N.F. Sheppard, D.R. Day et al., Microdielectrometry. Sensors Actuators 2(3), 263–274 (1982)Google Scholar
  42. A.J. Spence, K.B. Neeves et al., Flexible multielectrodes can resolve multiple muscles in an insect appendage. J. Neurosci. Meth. 159(1), 116–124 (2007)CrossRefGoogle Scholar
  43. W.C. Stacey, B. Litt, Technology insight: neuroengineering and epilepsy-designing devices for seizure control. Nat. Clin. Pract. Neurol. 4(4), 190–201 (2008)Google Scholar
  44. S. Takeuchi, D. Ziegler et al., Parylene flexible neural probes integrated with microfluidic channels. Lab Chip 5(5), 519–523 (2005)CrossRefGoogle Scholar
  45. E.P.M. van Westing, G.M. Ferrari et al., Determination of coating performance using electrochemical impedance spectroscopy. Electrochim. Acta 39(7), 899–910 (1994)CrossRefGoogle Scholar
  46. R.J. Vetter, J.C. Williams et al., Chronic neural recording using silicon-substrate microelectrode arrays implanted in cerebral cortex. IEEE Trans. Biomed. Eng. 51(6), 896–904 (2004)CrossRefGoogle Scholar
  47. M.S. Weaver, L.A. Michalski et al. Organic light-emitting devices with extended operating lifetimes on plastic substrates. Appl. Phys. Lett. 81(Copyright 2002, IEE), 2929-2931 (2002)Google Scholar
  48. K.D. Wise, Silicon microsystems for neuroscience and neural prostheses. IEEE Eng. Med. Biol. Mag. 24(5), 22–29 (2005)CrossRefGoogle Scholar
  49. K.D. Wise, A.M. Sodagar et al., Microelectrodes, microelectronics, and implantable neural microsystems. Proc. IEEE 96(7), 1184–1202 (2008)CrossRefGoogle Scholar
  50. D.S. Wuu, W.C. Lo et al., Plasma-deposited silicon oxide barrier films on polyethersulfone substrates: temperature and thickness effects. Surf. Coat. Technol. 197(Copyright 2006, IEE), 253-259 (2005)Google Scholar
  51. G.R. Yang, Y.P. Zhao et al., Chemical-mechanical polishing of parylene N and benzocyclobutene films. J. Electrochem. Soc. 144(9), 3249–3255 (1997)CrossRefGoogle Scholar
  52. Y. Yang, S. Basu et al., Fabrication of well-defined PLGA scaffolds using novel microembossing and carbon dioxide bonding. Biomaterials 26(15), 2585–2594 (2005)CrossRefGoogle Scholar
  53. H. Yasuda, B.H. Chun et al., Interface-engineered parylene C coating for corrosion protection of cold-rolled steel. Corrosion 52(3), 169–176 (1996)CrossRefGoogle Scholar
  54. H. Yasuda, Q.S. Yu et al., Interfacial factors in corrosion protection: an EIS study of model systems. Prog. Org. Coat. 41(4), 273–279 (2001)CrossRefGoogle Scholar
  55. J. Zeng, A. Aigner et al., Poly(vinyl alcohol) nanofibers by electrospinning as a protein delivery system and the retardation of enzyme release by additional polymer coatings. Biomacromolecules 6(3), 1484–1488 (2005)CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC 2011

Authors and Affiliations

  • John P. Seymour
    • 1
  • Nick B. Langhals
    • 1
  • David J. Anderson
    • 1
  • Daryl R. Kipke
    • 1
  1. 1.Department of Electrical EngineeringUniversity of MichiganAnn ArborUSA

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