Biomedical Microdevices

, Volume 12, Issue 6, pp 1009–1017 | Cite as

Versatile methods for the fabrication of polyvinylidene fluoride microstructures

  • Daniel Gallego-Perez
  • Nicholas J. Ferrell
  • Natalia Higuita-Castro
  • Derek J. Hansford


Polyvinylidene fluoride (PVDF) microstructures are of interest for a number of BioMEMS applications both for their piezoelectric and biocompatible properties. In this work, simple soft lithography-based techniques were developed to fabricate PVDF microstructures with diverse geometries, including microarrays of pillars, lines, and wells. Four different microstructure configurations were created: freestanding, stamped discontinuous, stamped continuous and imprinted patterns. Features with lateral dimensions down to 1 μm were consistently reproduced on 2.5 cm diameter areas. Atomic force microscopy (AFM) measurements of poled PVDF microstructures confirmed a marked inverse piezoelectric behavior. The techniques presented here have a number of advantages over previously demonstrated PVDF micropatterning approaches.


Fluoropolymers Microfabrication Molding Piezoelectric Soft lithography 

Supplementary material

10544_2010_9455_MOESM1_ESM.docx (1.7 mb)
Supplementary Figure 1(a) Setup used for patterning/transferring PVDF microstructures using heat and pressure, (b) Close-up showing a patterned PVDF film being transferred from the PDMS mold onto a conductive substrate. (DOCX 1755 kb)
10544_2010_9455_MOESM2_ESM.docx (2.1 mb)
Supplementary Figure 2(a) PDMS stamp being peeled away from the patterned PVDF film, (b) PVA layer being lifted out of the PDMS mold (carrying the PVDF microstructures), (c) PVDF microstructures stamped on a rigid substrate (left), flexible substrate (middle), and on the PVA layer (right). Inset shows a SEM micrograph of a freestanding PVDF microstructure recovered by filtering the dissolved PVA layer. (DOCX 2135 kb)
10544_2010_9455_MOESM3_ESM.docx (2 mb)
Supplementary Figure 3(a) Poling and (b) actuation setups (inset in (a) shows a close-up of the sample with the connections made to the power supply). (DOCX 2056 kb)


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Copyright information

© Springer Science+Business Media, LLC 2010

Authors and Affiliations

  • Daniel Gallego-Perez
    • 1
  • Nicholas J. Ferrell
    • 1
  • Natalia Higuita-Castro
    • 1
  • Derek J. Hansford
    • 1
  1. 1.Department of Biomedical EngineeringThe Ohio State UniversityColumbusUSA

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