Biomedical Microdevices

, Volume 12, Issue 1, pp 55–62

Principle design and actuation of a dual chamber electromagnetic micropump with coaxial cantilever valves


DOI: 10.1007/s10544-009-9358-9

Cite this article as:
Zordan, E., Amirouche, F. & Zhou, Y. Biomed Microdevices (2010) 12: 55. doi:10.1007/s10544-009-9358-9


This paper deals with the design and characterization of an electromagnetic actuation micropump with superimposed dual chambers. An integral part of microfluidic system includes micropumps which have become a critical design focus and have the potential to alter treatment and drug delivery requirements to patients. In this paper, conceptual design of variable geometrical nozzle/diffuser elements, coaxial cantilever valve, is proposed. It takes advantages of cantilever fluctuating valves with preset geometry to optimize and control fluid flow. The integration of this conceptual valve into a dual chamber micropump has increased the flow rate when compared to a single chamber micropump. This technique also allows for the fluid flow to be actively controlled by adjusting the movement of the intermediate membrane and the cantilever valves due to their fast response and large deflection properties when subjected to an electromagnetic field. To ensure reliability and performance of both the membrane and electromagnets, finite element method was used to perform the stress-strain analysis and optimize the membrane structure and electromagnet configuration. The frequency-dependent flow rates and backpressure are investigated for different frequencies by varying the applied currents from 1A to 1.75A. The current micropump design exhibits a backpressure of 58 mmH2O and has a water flow rate that reaches maximum at 1.985 ml/s under a 1.75A current with a resonance frequency of 45 Hz. This proposed micropump while at its initial prototype stage can satisfy the requirements of wide flow rate drug delivery applications. Its controllability and process design are attractive for high volume fabrication and low cost.


Micropump Electromagnetic actuation Active cantilever valve Nozzle/diffuser 

Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.Biomechanics Research Laboratory, Department of Mechanical EngineeringUniversity of IllinoisChicagoUSA

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