Acta Mechanica Sinica

, Volume 34, Issue 2, pp 381–391 | Cite as

Micromechanics of substrate-supported thin films

  • Wei He
  • Meidong Han
  • Shibin Wang
  • Lin-An Li
  • Xiuli Xue
Review Paper
  • 138 Downloads

Abstract

The mechanical properties of metallic thin films deposited on a substrate play a crucial role in the performance of micro/nano-electromechanical systems (MEMS/NEMS) and flexible electronics. This article reviews ongoing study on the mechanics of substrate-supported thin films, with emphasis on the experimental characterization techniques, such as the rule of mixture and X-ray tensile testing. In particular, the determination of interfacial adhesion energy, film deformation, elastic properties and Bauschinger effect are discussed.

Keywords

Thin films Deformation Adhesion Elastic property Bauschinger effect 

Notes

Acknowledgements

This work was supported by the National Natural Science Foundation of China (Grants 11472186 and 11602083) and the Natural Science Foundation of Hunan Province, China (Grant 2016JJ6044).

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Copyright information

© The Chinese Society of Theoretical and Applied Mechanics; Institute of Mechanics, Chinese Academy of Sciences and Springer-Verlag GmbH Germany 2017

Authors and Affiliations

  • Wei He
    • 1
  • Meidong Han
    • 1
  • Shibin Wang
    • 1
  • Lin-An Li
    • 1
  • Xiuli Xue
    • 2
  1. 1.Department of MechanicsTianjin UniversityTianjinChina
  2. 2.Department of Engineering MechanicsHunan University of Science and TechnologyXiangtanChina

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