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Modeling and simulation of a novel vertical actuator based on electrowetting on dielectric

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Abstract

A novel vertical actuator based on electrowetting on dielectric (EWOD) was designed, analyzed and simulated. Modeling results indicated that the vertical driving force of the actuator obeyed a second order polynomial of applied voltage, which was verified by Covent_ware 2006. As a result, the vertical driving force of the EWOD actuator with a 1.1nL droplet and a 1.75 μm thick polymer was about 0.5 μN under an applied voltage 100V which was comparable to that of the electrostatic actuators. Moreover, the noise from plane forces we analyzed and simulated was very low. Therefore, we made a conclusion that the EWOD actuator can be used in MEMS transducer.

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References

  1. Verheijen H.J.J., Prins M.W.J.: Contact angle and wetting velocity measured electrically. Rev. Sci. Instrum. 70, 3668–3673 (1999)

    Article  Google Scholar 

  2. Feenstral, B.J., Hayes, R.A., Dijk, R.V.: Electrowetting-based displays: bringing microfluidics alive on-screen. In: Proc. MEMS2006, 22–26 January 2006, pp. 48–53. Istanbul, Turkey (2006)

  3. Hoshino, K. et al.: Electrowetting-based actuation for microinjection. In: TRANSDUCERS Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003, vol. 2(8–12), pp. 1800–1803. IEEE, Boston (2003)

  4. Kwang, S.Y., Cho, J., Bu, J.U., Kim, G.H., Jeon, Y.S., Kim, C.J., Euisik Yoon: A micropump driven by continuous electrowetting actuation for low voltage and low power operations. In: Proc. IEEE MEMS Workshop, pp. 487–490 (2001)

  5. Junghoon L., Kim C.J.: Surface-tension-driven microactuation based on continuous electrowetting, J. MEMS 9(2), 171–180 (2000)

    Google Scholar 

  6. Cho S.K., Hyejin M., Kim C.J.: Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuits. J. MEMS 12(1), 70–80 (2003)

    Google Scholar 

  7. Jan L., Andreas G., Jan G.K.: Modeling, simulation, and optimization of electrowetting. Trans. IEEE CAD IC SYS 25(2), 234–247 (2006)

    Google Scholar 

  8. Hyungmin, K., Joonwon, K.: EWOD (Electrowetting-on-dielectric) actuated optical micromirror. In: Proc. MEMS2006, 22–26 January 2006, pp. 742–745. Istanbul, Turkey (2006)

  9. Takei, A., Iwase, E., Hoshino, K.: Angle tunable liquid wedge prism driven by electrowetting. In: Proc. MEMS2006, 22–26 January 2006, pp. 36–39. Istanbul, Turkey (2006)

  10. Zeng X.F., Yue R.F., Wu J.G.: Actuation and control of droplets by using electrowetting-on-dielectric. CPL 21(9), 1851–1854 (2004)

    Google Scholar 

  11. Dai W., Zhao Y.P.: The nonlinear phenomena of thin polydimethylsiloxane (PDMS) films in electrowetting. Int. J. Nonlinear Sci. 8(4), 519–526 (2007)

    Google Scholar 

  12. Dai W., Zhao Y.P.: An electrowetting model for rough surfaces under low voltage. J. Adhes. Sci. Technol. 22(2), 217–229 (2008)

    Article  Google Scholar 

  13. Clarence, A.M., Neogi, P. Marcel, D.: Interfacial Phenomena: Equilibrium and Dynamic Effects, pp. 49–75. CRC Press, Boca Raton (1985)

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Authors and Affiliations

  1. National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, 100871, Beijing, China

    Ping An, Jing Chen & Yilong Hao

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  1. Ping An
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  2. Jing Chen
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  3. Yilong Hao
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Correspondence to Yilong Hao.

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An, P., Chen, J. & Hao, Y. Modeling and simulation of a novel vertical actuator based on electrowetting on dielectric. Acta Mech Sin 25, 669–675 (2009). https://doi.org/10.1007/s10409-009-0263-5

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  • DOI: https://doi.org/10.1007/s10409-009-0263-5

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