Multi-scale, multi-depth lithography using optical fibers for microfluidic applications
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This paper proposes and demonstrates a method for multi-scale, multi-depth three-dimensional (3D) lithography. In this method, 3D molds for replicating microchannels are fabricated by passing a non-focused laser beam through an optical fiber, whose tip is immersed in a droplet of photopolymer. Line width is adjustable from 1 to 980 µm using eight kinds of optical fibers with different core diameters. The height of line drawing can be controlled by adjusting the distance between the tip of the optical fiber and a substrate. The surface roughness (Ra, Rz) of a single line and plane was evaluated. The method was employed to fabricate a 3D mold of a microchannel containing tandem chambers, which was then successfully replicated in PDMS. Multi-scale, multi-depth 3D lithography can provide a simple, flexible tool for producing PDMS microfluidic devices.
Keywords3D printing Multi-scale Optical fiber Micro channel PDMS Molding
This work was supported by the Cross-Ministerial Strategic Innovation Promotion Program (SIP). The liquid photopolymer (TSR-883) used in this research was provided by CMET Inc.
Compliance with ethical standards
Conflict of interest
There are no conflicts of interest to declare.
- Ikuta K, Maruo S, Hasegawa T, Adachi T (2001) Micro-stereolithography and its application to biochemical IC chip. In: Gower MC, Helvajian H, Sugioka K, Dubowski JJ (eds) Laser Applications in Microelectronic and Optoelectronic Manufacturing VI. Proc. SPIE 4274, pp 360–374. https://doi.org/10.1117/12.432529
- McDonald, JC, Duffy, DC, Anderson, JR, Chiu, DT, Wu, HK, Schueller, OJA, Whitesides, GM (2000a) Fabrication of microfluidic systems in poly(dimethylsiloxane). Electrophoresis 21:27–40. https://doi.org/10.1002/(SICI)1522-2683(20000101)21:1<27::AID-ELPS27>3.3.CO;2-3 CrossRefGoogle Scholar
- Stone HA, Stroock AD, Ajdari A (2004) Engineering flows in small devices: microfluidics toward a lab-on-a-chip. Annu Rev Fluid Mech 36:381–411. https://doi.org/10.1146/annurev.fluid.36.050802.122124 CrossRefzbMATHGoogle Scholar