Abstract
We report the design, fabrication, and testing of super permeable nano-channel membranes, characterized by the absolute control in the pore size at the nano-scale dimensions, large surface area, very high permeability, mechanical stability and durability. The membranes were fabricated using a unique nanotechnology process that combines laser interferometric lithography to define nano-channels (pores) and micro-machining to produce free-standing amorphous silicon membranes, allowing rapid and cost-effective mass production. The suspended membranes were defined as 50 nm thick a-Si, characterized by a very high porosity of approximately 20%, achieved by definition of large arrays of nano-channels. The dimensions of each individual nano-channel was 65 nm wide, 250 nm long. The measured apparent permeability was 0.14 ± 0.05 cm/min for each individual 70 μm × 70 μm membrane, representing one of the highest permeability values ever reported for this scale.
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Acknowledgments
This work was possible thanks to the MIT-Harvard Center of Cancer for Nanotechnology Excellence (CCNE), NIH grant: 5-U54-CA119349-04. The authors also want to thank Prof. Steve Brueck and Mr. Alex Laub for their support in the fabrication at the Center for High Technology Materials, University of New Mexico.
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Elman, N.M., Daniel, K., Jalali-Yazdi, F. et al. Super permeable nano-channel membranes defined with laser interferometric lithography. Microfluid Nanofluid 8, 557–563 (2010). https://doi.org/10.1007/s10404-009-0537-z
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DOI: https://doi.org/10.1007/s10404-009-0537-z