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Photo-definable microchannels made with spin-on polymers and short sacrificial etch times

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Abstract

Hollow tubular microfluidic channels were fabricated from two spin-on, photodefinable polymers.

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Acknowledgments

We are grateful to the Micron Foundation and the Brigham Young University Office of Research and Creative Activities for their support.

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Authors and Affiliations

  1. Department of Electrical Engineering, Brigham Young University, Provo, UT, 84602, USA

    Christopher J. Carron, Mallory Phillips, Brian S. Phillips, Laurie-Anne Parks, Stephen M. Schultz & Aaron R. Hawkins

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  1. Christopher J. Carron
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  2. Mallory Phillips
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  3. Brian S. Phillips
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  4. Laurie-Anne Parks
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  5. Stephen M. Schultz
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  6. Aaron R. Hawkins
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Correspondence to Aaron R. Hawkins.

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Carron, C.J., Phillips, M., Phillips, B.S. et al. Photo-definable microchannels made with spin-on polymers and short sacrificial etch times. Microfluid Nanofluid 7, 283–289 (2009). https://doi.org/10.1007/s10404-009-0404-y

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  • DOI: https://doi.org/10.1007/s10404-009-0404-y

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