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Three-way silicon microvalve for pneumatic applications with electrostatic actuation principle

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Abstract

We present a normally closed electrostatically driven 3-way microvalve which is able to meet the requirements of industrial applications like small form factor, high flow rate, low weight, low power consumption and a short response time. The microvalve consists of a 3 layer full-wafer bonded silicon chip stack mounted on a ceramics substrate and a plastic cap covering the valve. A driver electronics which converts the TTL level to the actuation voltage of 200 V is placed on top of the valve. The valve operates in a pressure range of up to 8 bar and offers a flow rate of approximately 500 sccm. Due to the electrostatic actuation principle the peak power consumption is below 10 mW and the response time is below 1 ms.

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Acknowledgements

The authors would like to thank the State of Baden-Württemberg (Germany) for the financial support of this research.

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Authors and Affiliations

  1. HSG-IMIT, Wilhelm-Schickard-Str. 10, 78052, Villingen-Schwenningen, Germany

    S. Messner & R. Zengerle

  2. Hoerbiger-Origa Systems GmbH, Südliche Römerstrasse 15, 86972, Altenstadt, Germany

    J. Schaible

  3. IMTEK, University of Freiburg, Georges-Köhler-Allee 103, 79110, Freiburg, Germany

    R. Zengerle

  4. IFF-LMST, University of Stuttgart, Nobelstraße 12, 70569, Stuttgart, Germany

    H. Sandmaier

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  1. S. Messner
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  2. J. Schaible
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  3. H. Sandmaier
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  4. R. Zengerle
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Correspondence to S. Messner.

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Messner, S., Schaible, J., Sandmaier, H. et al. Three-way silicon microvalve for pneumatic applications with electrostatic actuation principle. Microfluid Nanofluid 2, 89–96 (2006). https://doi.org/10.1007/s10404-005-0048-5

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  • DOI: https://doi.org/10.1007/s10404-005-0048-5

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