Abstract
A linear fluorinated benzocyclobutene-type monomer (4F-bis-BCB) was facilely synthesized by a one-step copper-catalyzed etherification reaction and a simple precipitation post-purification method. Moreover, a series of BCB-based polymeric low-dielectric (low-k) materials were obtained by the thermal-induced ring-opening copolymerization of 4F-bis-BCB with divinyl tetramethyl disiloxane-bisbenzocyclobutene (DVS-BCB) monomer and further simple thermal curing at high temperature (200–300 °C). The resultant fully cured materials demonstrated excellent low dielectric properties at high frequency of 10 GHz (dielectric constant (Dk)<2.6, dielectric loss (Df)<1.57×10−2), great hydrophobicity (water contact angle >116°), ultra-low water absorption (<0.19% after soaked in water at room temperature for 60 h) and excellent planarization ability (surface roughness<0.56 nm of 3 µm-thick film). Overall, this new fluorinated BCB-type monomer provides us an alternative for the facile preparation of low-k polymeric materials and exhibits great potential for future applications in high-frequency communication and three-dimensional high-density packaging technologies.
Similar content being viewed by others
References
Markoski, L. J.; Walker, K. A.; Deeter, G. A.; Spilman, G. E.; Martin, D. C.; Moore, J. S. Cross-linkable copolymers of poly(p-phenyleneterephthalamide). Chem. Mater. 1993, 5, 248–250.
Walker, K. A.; Markoski, L. J.; Deeter, G. A.; Spilman, G. E.; Martin, D. C.; Moore, J. S. Crosslinking chemistry for high-performance polymer networks. Polymer 1994, 35, 5012–5017.
Chapman, O. L.; Tsou, U. P. E.; Johnson, J. W. Thermal isomerization of benzocyclobutene. J. Am. Chem. Soc. 2002, 109, 553–559.
Tan, L.-S.; Arnold, F. E. Benzocyclobutene in polymer synthesis. I. Homopolymerization of bisbenzocyclobutene aromatic imides to form high-temperature resistant thermosetting resins. J. Polym. Sci., Part A: Polym. Chem. 1988, 26, 1819–1834.
Kirchhoff, R. A.; Bruza, K. J. Benzocyclobutenes in polymer synthesis. Prog. Polym. Sci. 1993, 18, 85–185.
Mills, M. E.; Townsend, P.; Castillo, D.; Martin, S.; Achen, A. Benzocyclobutene (DVS-BCB) polymer as an interlayer dielectric (ILD) material. Microelectron. Eng. 1997, 33, 327–334.
Lee, K.; He, J.; Clement, R.; Massia, S.; Kim, B. Biocompatible benzocyclobutene (BCB)-based neural implants with microfluidic channel. Biosens. Bioelectron. 2004, 20, 404–407.
Tételin, A.; Pellet, C.; Laville, C.; N’Kaoua, G. Fast response humidity sensors for a medical microsystem. Sens. Actuators, B 2003, 91, 211–218.
Chua, L.-L.; Ho, P. K. H.; Sirringhaus, H.; Friend, R. H. High-stability ultrathin spin-on benzocyclobutene gate dielectric for polymer field-effect transistors. Appl. Phys. Lett. 2004, 84, 3400–3402.
Wu, Q.; Lorenz, N.; Hand, D. P. Localised laser joining of glass to silicon with BCB intermediate layer. Microsyst. Technol. 2009, 15, 1051–1057.
Young-tack, H.; Kim, Y. I.; Lee, M.; Sunhee, P.; Dongha, S.; Park, C. M.; Hong, B.; Roh, Y.; Hae Jung, S.; Song, I. Post-etch residue removal in BCB/Cu interconnection structure. Thin Solid Films 2003, 435, 238–241.
Krishnamurthy, V. B.; Cole, H. S.; Sitnik-Nieters, T. Use of BCB in high frequency MCM interconnects. IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part B 1996, 19, 42–47.
Wolff, S.; Giehl, A. R.; Renno, M.; Fouckhardt, H. Metallic waveguide mirrors in polymer film waveguides. Appl. Phys. B 2014, 73, 623–627.
Chen, Y.; Feng, J. B.; Zhou, Z. P.; Yu, J.; Summers, C. J.; Citrin, D. S. Fabrication of silicon microring resonator with smooth sidewalls. J. Micro-Nanolithography Mems. Moems. 2009, 8, 043060.
Keyvaninia, S.; Muneeb, M.; Stanković, S.; Van Veldhoven, P. J.; Van Thourhout, D.; Roelkens, G. Ultra-thin DVS-BCB adhesive bonding of III–V wafers, dies and multiple dies to a patterned silicon-on-insulator substrate. Opt. Mater. Express 2012, 3, 35–46.
Zhang, J.; Haq, B.; O’Callaghan, J.; Gocalinska, A.; Pelucchi, E.; Trindade, A. J.; Corbett, B.; Morthier, G.; Roelkens, G. Transfer-printing-based integration of a III–V-on-silicon distributed feedback laser. Opt. Expr. 2018, 26, 8821–8830.
Lee, K.; Massia, S.; He, J. Biocompatible benzocyclobutene-based intracortical neural implant with surface modification. J. Micromech. Microeng. 2005, 15, 2149–2155.
Zhu, H.; He, J.; Kim, B. High-yield benzocyclobutene(BCB) based neural implants for simultaneous intra- and extracortical recording in rats. Conf. Proc. IEEE Eng. Med. Biol. Soc. 2004, 2004, 4341–4344.
Perettie, D. J.; M. F. M., Phil E. Garrou Benzocyclobutene as a planarization resin for flat panel displays. Liq. Cryst. Mater. Devic. Appl. 1992, 1665, 331–337.
Bastug, E.; Bennis, M.; Medard, M.; Debbah, M. Toward interconnected virtual reality: opportunities, challenges, and enablers. IEEE Commun. Mag. 2017, 55, 110–117.
Fu, F.; Shen, M.; Wang, D.; Liu, H.; Shang, S.; Hu, F. L.; Song, Z.; Song, J. Facile strategy for preparing a rosin-based low-k material: molecular design of free volume. Biomacromolecules 2022, 23, 2856–2866.
Kong, L.; Cheng, Y.; Jin, Y.; Ren, Z.; Li, Y.; Xiao, F. Adamantyl-based benzocyclobutene low-k polymers with good physical properties and excellent planarity. J. Mater. Chem. C 2015, 3, 3364–3370.
Zhou, D. L.; Li, J. H.; Guo, Q. Y.; Lin, X.; Zhang, Q.; Chen, F.; Han, D.; Fu, Q. Polyhedral oligomeric silsesquioxanes based ultralow-k materials: the effect of cage size. Adv. Funct. Mater. 2021, 31, 2102074.
Li, R.; Yang, X.; Li, J.; Shen, Y.; Zhang, L.; Lu, R.; Wang, C.; Zheng, X.; Chen, H.; Zhang, T. Review on polymer composites with high thermal conductivity and low dielectric properties for electronic packaging. Mater. Today Phys. 2022, 22, 100594.
Wei, J. J.; Zhu, L. Intrinsic polymer dielectrics for high energy density and low loss electric energy storage. Prog. Polym. Sci. 2020, 106, 101254.
Rajesh, S.; Nisa, V. S.; Murali, K. P.; Ratheesh, R. Microwave dielectric properties of PTFE/rutile nanocomposites. J. Alloys Compd. 2009, 477, 677–682.
He, F.; Jin, K.; Wang, J.; Luo, Y.; Sun, J.; Fang, Q. New fluoropolymers having both low water uptake and a low dielectric constant. Macromol. Chem. Phys. 2015, 216, 2302–2308.
He, F. K.; Yuan, C.; Li, K.; Diao, S.; Jin, K. K.; Wang, J. J.; Tong, J. W.; Ma, J.; Fang, Q. A new low dielectric material with high thermostability based on a thermosetting trifluoromethyl substituted aromatic molecule. RSC Adv. 2013, 3, 23128–23132.
Ullmann, F. Ueber symmetrische Biphenylderivate. Justus Liebig’s Annalen der Chemie 1904, 332, 38–81.
Niu, J.; Guo, P.; Kang, J.; Li, Z.; Xu, J.; Hu, S. Copper(I)-catalyzed aryl bromides to form intermolecular and intramolecular carbon-oxygen bonds. J. Org. Chem. 2009, 74, 5075–5078.
Zhou, J.; Wang, J.; Zhao, J.; Jin, K.; Sun, J.; Guo, X.; Fang, Q. A newfluoropolymer having triazine rings as a dielectric material: synthesis and properties. Polym. Chem. 2017, 8, 6173–6180.
Tian, S.; Sun, J.; Jin, K.; Wang, J.; He, F.; Zheng, S.; Fang, Q. Postpolymerization of a fluorinated and reactive poly(aryl ether): an efficient way to balance the solubility and solvent resistance of the polymer. ACS Appl. Mater. Interfaces 2014, 6, 20437–20443.
Zhu, P.; Yang, H.; He, P. The speciality and meaning of interactions between macromolecules. Polym. Bull. 2002, 5, 73–78.
Cheng, Y.; Tian, S.; Shi, Y.; Chen, W.; Li, Z.; Zhu, T.; Zhang, Z. Benzocyclobutene organosiloxane resins prepared by alcoholysis of BCB functionalized chlorosilane for highly crosslinked low-k thermosets. Eur. Polym. J. 2017, 95, 440–447.
Maier, G. Low dielectric constant polymers for microelectronics. Prog. Polym. Sci. 2001, 26, 3–65.
Farona, M. F. Benzocyclobutenes in polymer chemistry. Prog. Polym. Sci. 1996, 21, 505–555.
Acknowledgments
This work was financially supported by the National Natural Science Foundation of China (No. 22075298) and the Beijing Municipal Natural Science Foundation (No. 2212053).
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
The authors declare no interest conflict.
Electronic Supplementary Information
Rights and permissions
About this article
Cite this article
Sun, Q., Yuan, ZW., Fan, WJ. et al. Low Dielectric Benzocyclobutene-type Polymers Based on Facile Synthesis of Linear Fluorinated Monomer. Chin J Polym Sci 41, 1760–1766 (2023). https://doi.org/10.1007/s10118-023-2955-x
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10118-023-2955-x